JPS6464280A - Laser equipment - Google Patents

Laser equipment

Info

Publication number
JPS6464280A
JPS6464280A JP21912087A JP21912087A JPS6464280A JP S6464280 A JPS6464280 A JP S6464280A JP 21912087 A JP21912087 A JP 21912087A JP 21912087 A JP21912087 A JP 21912087A JP S6464280 A JPS6464280 A JP S6464280A
Authority
JP
Japan
Prior art keywords
laser
polarization
optically active
harmonic wave
laser ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21912087A
Other languages
Japanese (ja)
Inventor
Shinichi Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21912087A priority Critical patent/JPS6464280A/en
Publication of JPS6464280A publication Critical patent/JPS6464280A/en
Pending legal-status Critical Current

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  • Lasers (AREA)

Abstract

PURPOSE:To obtain the third harmonic wave, by arranging a first and a second nonlinear optical elements and an optically active substance on the optical path, and in the order of travelling direction of laser ray emitted from a laser oscillator wherein alexandrite is applied to laser medium. CONSTITUTION:On the optical path of laser ray L emitted from a laser oscillator 1, a first nonlinear optical element 2, an optically active substance 10 composed of quartz, and a second nonlinear optical element 8 are coaxially arranged in order of the travelling direction of the laser ray. When an optical rotary angle between the fundamental wave and the double harmonic wave of the laser ray is 90 degrees for a thickness, the polarization between two perpendicular optical waves is arranged in the same direction, by passing through the optically active quartz. After all, the two perpendicular lights have the same direction of polarization by the effect of rotary polarization. Therefore, the power loss of the treble harmonic wave can be reduced by alexandrite laser.
JP21912087A 1987-09-03 1987-09-03 Laser equipment Pending JPS6464280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21912087A JPS6464280A (en) 1987-09-03 1987-09-03 Laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21912087A JPS6464280A (en) 1987-09-03 1987-09-03 Laser equipment

Publications (1)

Publication Number Publication Date
JPS6464280A true JPS6464280A (en) 1989-03-10

Family

ID=16730558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21912087A Pending JPS6464280A (en) 1987-09-03 1987-09-03 Laser equipment

Country Status (1)

Country Link
JP (1) JPS6464280A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0418890A2 (en) * 1989-09-21 1991-03-27 Mitsui Petrochemical Industries, Ltd. Solid state laser device for lithography light source and semiconductor lithography method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0418890A2 (en) * 1989-09-21 1991-03-27 Mitsui Petrochemical Industries, Ltd. Solid state laser device for lithography light source and semiconductor lithography method

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