JPS646048U - - Google Patents

Info

Publication number
JPS646048U
JPS646048U JP10126587U JP10126587U JPS646048U JP S646048 U JPS646048 U JP S646048U JP 10126587 U JP10126587 U JP 10126587U JP 10126587 U JP10126587 U JP 10126587U JP S646048 U JPS646048 U JP S646048U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
side walls
carrier
peripheral portion
sandwiched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10126587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10126587U priority Critical patent/JPS646048U/ja
Publication of JPS646048U publication Critical patent/JPS646048U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP10126587U 1987-06-30 1987-06-30 Pending JPS646048U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10126587U JPS646048U (US07709020-20100504-C00041.png) 1987-06-30 1987-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10126587U JPS646048U (US07709020-20100504-C00041.png) 1987-06-30 1987-06-30

Publications (1)

Publication Number Publication Date
JPS646048U true JPS646048U (US07709020-20100504-C00041.png) 1989-01-13

Family

ID=31330102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10126587U Pending JPS646048U (US07709020-20100504-C00041.png) 1987-06-30 1987-06-30

Country Status (1)

Country Link
JP (1) JPS646048U (US07709020-20100504-C00041.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03143837A (ja) * 1989-10-26 1991-06-19 Oki Electric Ind Co Ltd ウエハ搬送処理装置とそれを用いた搬送処理方法
JPH0548658U (ja) * 1991-12-09 1993-06-29 泰東製綱株式会社 海中生物付着防止装置
JPH0626263U (ja) * 1992-08-31 1994-04-08 株式会社柿崎製作所 薄板用支持容器
JP2002208627A (ja) * 2001-01-11 2002-07-26 Seiko Instruments Inc ウエハキャリアケース

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03143837A (ja) * 1989-10-26 1991-06-19 Oki Electric Ind Co Ltd ウエハ搬送処理装置とそれを用いた搬送処理方法
JPH0548658U (ja) * 1991-12-09 1993-06-29 泰東製綱株式会社 海中生物付着防止装置
JPH0626263U (ja) * 1992-08-31 1994-04-08 株式会社柿崎製作所 薄板用支持容器
JP2002208627A (ja) * 2001-01-11 2002-07-26 Seiko Instruments Inc ウエハキャリアケース
JP4497731B2 (ja) * 2001-01-11 2010-07-07 セイコーインスツル株式会社 ウエハキャリアケース

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