JPS646037U - - Google Patents
Info
- Publication number
- JPS646037U JPS646037U JP10062487U JP10062487U JPS646037U JP S646037 U JPS646037 U JP S646037U JP 10062487 U JP10062487 U JP 10062487U JP 10062487 U JP10062487 U JP 10062487U JP S646037 U JPS646037 U JP S646037U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- sputtering
- chamber
- electrode
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 238000000992 sputter etching Methods 0.000 claims 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987100624U JPH0737313Y2 (ja) | 1987-06-30 | 1987-06-30 | スパッタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987100624U JPH0737313Y2 (ja) | 1987-06-30 | 1987-06-30 | スパッタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS646037U true JPS646037U (fr) | 1989-01-13 |
| JPH0737313Y2 JPH0737313Y2 (ja) | 1995-08-23 |
Family
ID=31328867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987100624U Expired - Lifetime JPH0737313Y2 (ja) | 1987-06-30 | 1987-06-30 | スパッタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737313Y2 (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681533U (fr) * | 1979-11-27 | 1981-07-01 | ||
| JPS60249329A (ja) * | 1984-05-25 | 1985-12-10 | Anelva Corp | スパッタエッチング装置 |
-
1987
- 1987-06-30 JP JP1987100624U patent/JPH0737313Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681533U (fr) * | 1979-11-27 | 1981-07-01 | ||
| JPS60249329A (ja) * | 1984-05-25 | 1985-12-10 | Anelva Corp | スパッタエッチング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737313Y2 (ja) | 1995-08-23 |