JPS6459747A - Ion beam shaping device - Google Patents

Ion beam shaping device

Info

Publication number
JPS6459747A
JPS6459747A JP21680687A JP21680687A JPS6459747A JP S6459747 A JPS6459747 A JP S6459747A JP 21680687 A JP21680687 A JP 21680687A JP 21680687 A JP21680687 A JP 21680687A JP S6459747 A JPS6459747 A JP S6459747A
Authority
JP
Japan
Prior art keywords
superconducting
coil
flux
ion beam
beam shaping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21680687A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Kani
Shunsuke Matsuda
Hiroshi Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21680687A priority Critical patent/JPS6459747A/en
Publication of JPS6459747A publication Critical patent/JPS6459747A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an efficient rise in flux density by providing a superconducting wire in a magnetic field generation part or the focusing part of a magnetic field. CONSTITUTION:In an ion beam shaping device, there are provided a superconducting coil 7 and a superconducting flux throttle 16. After the superconducting coil 7 is set to a normal mode, electric current is supplied thereto and the coil 7 is turned into a superconducting mode. Then, a gas is introduced from a gas introduction inlet 6 and arc discharge is thereby generated between a cathode and an anode 9. Thereafter, an electrical field in an axial direction is throttled by superconducting flux 16 between an intermediate electrode 8 and the anode 9, and the plasma of high density is thereby generated. The use of the superconducting coil 7 eliminates the occurrence of Joule's heat and power consumption is reduced. And high plasma can be efficiently obtained due to the Meissner effect of superconductiyity.
JP21680687A 1987-08-31 1987-08-31 Ion beam shaping device Pending JPS6459747A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21680687A JPS6459747A (en) 1987-08-31 1987-08-31 Ion beam shaping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21680687A JPS6459747A (en) 1987-08-31 1987-08-31 Ion beam shaping device

Publications (1)

Publication Number Publication Date
JPS6459747A true JPS6459747A (en) 1989-03-07

Family

ID=16694181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21680687A Pending JPS6459747A (en) 1987-08-31 1987-08-31 Ion beam shaping device

Country Status (1)

Country Link
JP (1) JPS6459747A (en)

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