JPS6458442A - Correction of yawing of xy-stage - Google Patents

Correction of yawing of xy-stage

Info

Publication number
JPS6458442A
JPS6458442A JP62216604A JP21660487A JPS6458442A JP S6458442 A JPS6458442 A JP S6458442A JP 62216604 A JP62216604 A JP 62216604A JP 21660487 A JP21660487 A JP 21660487A JP S6458442 A JPS6458442 A JP S6458442A
Authority
JP
Japan
Prior art keywords
yawing
stage
theta
interferometers
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62216604A
Other languages
Japanese (ja)
Other versions
JP2593483B2 (en
Inventor
Noboru Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62216604A priority Critical patent/JP2593483B2/en
Publication of JPS6458442A publication Critical patent/JPS6458442A/en
Application granted granted Critical
Publication of JP2593483B2 publication Critical patent/JP2593483B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4852—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
    • B23Q1/4866—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To surely correct the variation of yawing by correcting the angle of a theta-table in the initial setting of an XY-table and correcting the angle by a theta-driving mechanism so that the difference of the output variation value of the second laser interferometer becomes zero. CONSTITUTION:In the initial period in positioning, an XY-stage 20 is shifted in the X-direction, and the distance shift quantity from an X-mirror 42 is measured by a laser interferometer 51. If a yawing error exists at this time, the shift quantity increases according to the yawing, and the angle of a theta-table 40 is corrected so that the output variation value of the laser interferometers 52 and 53 becomes zero, and the yawing error in the initial period is reduced to zero. Afterwards, each output of the interferometers 52 and 53 is compared in real time, shifting the XY-stage 20, and a theta-driving mechanism 30 is controlled so that the difference becomes zero. Therefore, each distance shift quantity at two detection points by the interferometers 52 and 53 becomes equal, and the variation of the yawing of the XY-stage 20 can be corrected.
JP62216604A 1987-08-31 1987-08-31 Initial setting method of XYθ table Expired - Lifetime JP2593483B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62216604A JP2593483B2 (en) 1987-08-31 1987-08-31 Initial setting method of XYθ table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62216604A JP2593483B2 (en) 1987-08-31 1987-08-31 Initial setting method of XYθ table

Publications (2)

Publication Number Publication Date
JPS6458442A true JPS6458442A (en) 1989-03-06
JP2593483B2 JP2593483B2 (en) 1997-03-26

Family

ID=16691027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62216604A Expired - Lifetime JP2593483B2 (en) 1987-08-31 1987-08-31 Initial setting method of XYθ table

Country Status (1)

Country Link
JP (1) JP2593483B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0419033A (en) * 1990-05-11 1992-01-23 Agency Of Ind Science & Technol Micro-locational device
WO2011066825A1 (en) * 2009-12-02 2011-06-09 Technische Universität Dresden Method for producing precise movements of objects with high accelerations, and device for this purpose
CN107695701A (en) * 2017-08-15 2018-02-16 高邮市永发机械有限公司 One kind is automatically positioned milling machine table

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5260074A (en) * 1975-11-12 1977-05-18 Jeol Ltd Charge particle beam apparatus
JPS61251026A (en) * 1985-04-30 1986-11-08 Canon Inc Exposing apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5260074A (en) * 1975-11-12 1977-05-18 Jeol Ltd Charge particle beam apparatus
JPS61251026A (en) * 1985-04-30 1986-11-08 Canon Inc Exposing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0419033A (en) * 1990-05-11 1992-01-23 Agency Of Ind Science & Technol Micro-locational device
WO2011066825A1 (en) * 2009-12-02 2011-06-09 Technische Universität Dresden Method for producing precise movements of objects with high accelerations, and device for this purpose
CN107695701A (en) * 2017-08-15 2018-02-16 高邮市永发机械有限公司 One kind is automatically positioned milling machine table

Also Published As

Publication number Publication date
JP2593483B2 (en) 1997-03-26

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