JPS6458442A - Correction of yawing of xy-stage - Google Patents
Correction of yawing of xy-stageInfo
- Publication number
- JPS6458442A JPS6458442A JP62216604A JP21660487A JPS6458442A JP S6458442 A JPS6458442 A JP S6458442A JP 62216604 A JP62216604 A JP 62216604A JP 21660487 A JP21660487 A JP 21660487A JP S6458442 A JPS6458442 A JP S6458442A
- Authority
- JP
- Japan
- Prior art keywords
- yawing
- stage
- theta
- interferometers
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
- B23Q1/4852—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
- B23Q1/4866—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single sliding pair
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To surely correct the variation of yawing by correcting the angle of a theta-table in the initial setting of an XY-table and correcting the angle by a theta-driving mechanism so that the difference of the output variation value of the second laser interferometer becomes zero. CONSTITUTION:In the initial period in positioning, an XY-stage 20 is shifted in the X-direction, and the distance shift quantity from an X-mirror 42 is measured by a laser interferometer 51. If a yawing error exists at this time, the shift quantity increases according to the yawing, and the angle of a theta-table 40 is corrected so that the output variation value of the laser interferometers 52 and 53 becomes zero, and the yawing error in the initial period is reduced to zero. Afterwards, each output of the interferometers 52 and 53 is compared in real time, shifting the XY-stage 20, and a theta-driving mechanism 30 is controlled so that the difference becomes zero. Therefore, each distance shift quantity at two detection points by the interferometers 52 and 53 becomes equal, and the variation of the yawing of the XY-stage 20 can be corrected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62216604A JP2593483B2 (en) | 1987-08-31 | 1987-08-31 | Initial setting method of XYθ table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62216604A JP2593483B2 (en) | 1987-08-31 | 1987-08-31 | Initial setting method of XYθ table |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6458442A true JPS6458442A (en) | 1989-03-06 |
JP2593483B2 JP2593483B2 (en) | 1997-03-26 |
Family
ID=16691027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62216604A Expired - Lifetime JP2593483B2 (en) | 1987-08-31 | 1987-08-31 | Initial setting method of XYθ table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2593483B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0419033A (en) * | 1990-05-11 | 1992-01-23 | Agency Of Ind Science & Technol | Micro-locational device |
WO2011066825A1 (en) * | 2009-12-02 | 2011-06-09 | Technische Universität Dresden | Method for producing precise movements of objects with high accelerations, and device for this purpose |
CN107695701A (en) * | 2017-08-15 | 2018-02-16 | 高邮市永发机械有限公司 | One kind is automatically positioned milling machine table |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5260074A (en) * | 1975-11-12 | 1977-05-18 | Jeol Ltd | Charge particle beam apparatus |
JPS61251026A (en) * | 1985-04-30 | 1986-11-08 | Canon Inc | Exposing apparatus |
-
1987
- 1987-08-31 JP JP62216604A patent/JP2593483B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5260074A (en) * | 1975-11-12 | 1977-05-18 | Jeol Ltd | Charge particle beam apparatus |
JPS61251026A (en) * | 1985-04-30 | 1986-11-08 | Canon Inc | Exposing apparatus |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0419033A (en) * | 1990-05-11 | 1992-01-23 | Agency Of Ind Science & Technol | Micro-locational device |
WO2011066825A1 (en) * | 2009-12-02 | 2011-06-09 | Technische Universität Dresden | Method for producing precise movements of objects with high accelerations, and device for this purpose |
CN107695701A (en) * | 2017-08-15 | 2018-02-16 | 高邮市永发机械有限公司 | One kind is automatically positioned milling machine table |
Also Published As
Publication number | Publication date |
---|---|
JP2593483B2 (en) | 1997-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071219 Year of fee payment: 11 |