JPS6457775A - Excimer laser - Google Patents

Excimer laser

Info

Publication number
JPS6457775A
JPS6457775A JP62214399A JP21439987A JPS6457775A JP S6457775 A JPS6457775 A JP S6457775A JP 62214399 A JP62214399 A JP 62214399A JP 21439987 A JP21439987 A JP 21439987A JP S6457775 A JPS6457775 A JP S6457775A
Authority
JP
Japan
Prior art keywords
angle
etalons
wavelength
wavelength selecting
smaller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62214399A
Other languages
Japanese (ja)
Inventor
Masahiko Kowaka
Osamu Wakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP62214399A priority Critical patent/JPS6457775A/en
Publication of JPS6457775A publication Critical patent/JPS6457775A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency

Abstract

PURPOSE:To set an outer wavelength selecting element to an angle smaller than a geometrical angle for generating a parasitic oscillation and to improve wavelength selecting performance and resonance efficiency by disposing an etalon having smallest free spectral range (FSR) of a plurality of etalons at a position nearest to a rear mirror. CONSTITUTION:An excimer laser light output from an excimer laser 1 is separated by a beam splitter 7 to an exposure beam and a control beam, the control beam is guided to a wavelength control system 9, and used to control to alter the wavelength selecting characteristics of etalons 5, 6 to obtain a desired wavelength laser light, such as the angle of the etalons 5, 6 with respect to an optical axis. When the etalon 6 having smaller FSR is disposed outside, its angle is set to that smaller than a geometrical angle theta1 for generating a parasitic oscillation. Thus, wavelength selecting performance and resonance efficiency can be further improved.
JP62214399A 1987-08-28 1987-08-28 Excimer laser Pending JPS6457775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214399A JPS6457775A (en) 1987-08-28 1987-08-28 Excimer laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214399A JPS6457775A (en) 1987-08-28 1987-08-28 Excimer laser

Publications (1)

Publication Number Publication Date
JPS6457775A true JPS6457775A (en) 1989-03-06

Family

ID=16655143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214399A Pending JPS6457775A (en) 1987-08-28 1987-08-28 Excimer laser

Country Status (1)

Country Link
JP (1) JPS6457775A (en)

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