JPH06140717A - External resonator type semiconductor laser light source - Google Patents

External resonator type semiconductor laser light source

Info

Publication number
JPH06140717A
JPH06140717A JP30929492A JP30929492A JPH06140717A JP H06140717 A JPH06140717 A JP H06140717A JP 30929492 A JP30929492 A JP 30929492A JP 30929492 A JP30929492 A JP 30929492A JP H06140717 A JPH06140717 A JP H06140717A
Authority
JP
Japan
Prior art keywords
semiconductor laser
external resonator
light
reflection film
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30929492A
Other languages
Japanese (ja)
Inventor
Minoru Maeda
稔 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP30929492A priority Critical patent/JPH06140717A/en
Publication of JPH06140717A publication Critical patent/JPH06140717A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/141External cavity lasers using a wavelength selective device, e.g. a grating or etalon

Abstract

PURPOSE:To obtain an external resonator type semiconductor laser light source of stable module structure wherein optical axis alignment is easy and narrow spectral line width is obtained without making the external resonator long. CONSTITUTION:A nonreflection film 1A is formed on one end surface of a semiconductor laser 1, and a total reflection film 1B is formed on the other end surface. An external resonator is constituted by using the total reflection film 1B of the semiconductor laser 1 and a diffraction grating 2. A beam splitter 3 whose reflection factor is low is inserted in the inside of the external resonator, thereby reflecting a part of resonating light in two directions.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は光信号源を用いる技術
の全ての分野、特に光コヒーレント通信、光コヒーレン
ト計測技術分野で使用する半導体レーザ光源についての
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser light source used in all fields of technology using an optical signal source, particularly in the field of optical coherent communication and optical coherent measurement technology.

【0002】[0002]

【従来の技術】従来技術による外部共振器型半導体レー
ザ光源の構成を図2に示す。図2の1は半導体レーザ、
1Aは無反射膜、2は回折格子、5は光アイソレータ、
6は集光用レンズ、7は光ファイバである。半導体レー
ザ1はLDドライブ回路8で駆動し、ファブリペロー型
のものを使用し、片端面に無反射膜1Aを施している。
図2で、半導体レーザ1は無反射膜1A側から光を出射
し、レンズ4Aで平行光に変換され、回折格子2に入射
する。回折格子2は外部反射器であり、特定の波長の光
を反射して、半導体レーザ1に帰還する。
2. Description of the Related Art FIG. 2 shows the structure of a conventional external cavity type semiconductor laser light source. 2 is a semiconductor laser,
1A is a non-reflection film, 2 is a diffraction grating, 5 is an optical isolator,
Reference numeral 6 is a condenser lens, and 7 is an optical fiber. The semiconductor laser 1 is driven by an LD drive circuit 8 and is of Fabry-Perot type, and one end face thereof is provided with a non-reflection film 1A.
In FIG. 2, the semiconductor laser 1 emits light from the non-reflection film 1A side, is converted into parallel light by the lens 4A, and is incident on the diffraction grating 2. The diffraction grating 2 is an external reflector, reflects light of a specific wavelength, and returns it to the semiconductor laser 1.

【0003】無反射膜1Aが施されていない半導体レー
ザ1の端面と回折格子2とで外部共振器が形成され、半
導体レーザ1は単一モード発振する。無反射膜1Aが施
されていない側の出射光は、レンズ4Bで平行光に変換
され、光アイソレータ5に入射し、集光用レンズ6で光
ファイバ7に入射する。
An external resonator is formed by the end face of the semiconductor laser 1 not provided with the antireflection film 1A and the diffraction grating 2, and the semiconductor laser 1 oscillates in a single mode. The emitted light on the side where the anti-reflection film 1A is not applied is converted into parallel light by the lens 4B, enters the optical isolator 5, and enters the optical fiber 7 by the condenser lens 6.

【0004】回折格子に角度調整機構9Aを持たせて回
転させると、選択される波長が変化し、半導体レーザの
利得範囲(百数十nm)で波長可変ができる。また、回
折格子に平行移動機構10Aを持たせて、共振器の光軸
方向に平行移動させると、共振器の位相条件が変化し、
縦モード間隔の周波数(数GHz)領域で波長可変す
る。そして、回折格子2の角度調整と回折格子2の平行
移動を同時に制御すると、位相連続な波長可変が可能と
なる。
When the diffraction grating is provided with the angle adjusting mechanism 9A and rotated, the selected wavelength is changed, and the wavelength can be tuned within the gain range (hundreds of tens of nm) of the semiconductor laser. Further, when the diffraction grating is provided with the parallel moving mechanism 10A and moved in parallel in the optical axis direction of the resonator, the phase condition of the resonator changes,
The wavelength is tuned in the frequency (several GHz) region of the longitudinal mode interval. Then, if the angle adjustment of the diffraction grating 2 and the parallel movement of the diffraction grating 2 are controlled at the same time, phase-continuous wavelength tunable becomes possible.

【0005】例えば、1992年電子情報通信学会春季大会
C-266 には、外部共振器長を120 mmで構成すると、縦
モード間隔が1.25GHz(0.01nm)で約10kHzのス
ペクトル線幅と約65GHzの位相連続波長可変が、ま
た、IEICE TRANS. COMMUN., VOL.E75-B, NO.6 JUNE 199
2 P521-523では、共振器長30mmではスペクトル線幅50
0kHz以下と130GHzの位相連続波長可変が得られた
ことが報告されている。
For example, 1992 IEICE Spring Conference
If the external cavity length is 120 mm, the C-266 has a spectral line width of approximately 10 kHz and a phase continuous wavelength tunable wavelength of approximately 65 GHz when the longitudinal mode spacing is 1.25 GHz (0.01 nm). ., VOL.E75-B, NO.6 JUNE 199
2 With P521-523, the spectral line width is 50 when the resonator length is 30 mm.
It is reported that phase continuous wavelength tunability of 0 kHz or less and 130 GHz was obtained.

【0006】[0006]

【発明が解決しようとする課題】図2の構成では、半導
体レーザ1の無反射膜1A側の出力光をレンズで平行光
に変換し、回折格子2に入射し、無反射膜1Aが施され
ていない端面からの出力光も、レンズで平行光に変換し
て光ファイバ7に入射するので、半導体レーザ1の両側
に平行光を作らなければならず、光軸合わせが難しくな
る。また、モジュールの構造は共振器方向に長く、大型
に成らざるをえず、外部環境の変化に敏感に影響を受
け、安定な光源が困難になる。
In the structure shown in FIG. 2, the output light of the semiconductor laser 1 on the non-reflection film 1A side is converted into parallel light by a lens and is incident on the diffraction grating 2 to form the non-reflection film 1A. The output light from the end face that is not formed is also converted into parallel light by the lens and is incident on the optical fiber 7. Therefore, parallel light must be generated on both sides of the semiconductor laser 1, and optical axis alignment becomes difficult. In addition, the structure of the module is long in the direction of the cavity and must be large, and it is sensitive to changes in the external environment, making it difficult to obtain a stable light source.

【0007】この発明は、光軸合わせが容易で、外部共
振器を長くせずに狭スペクトル線幅が得られる安定なモ
ジュール構造の外部共振器型半導体レーザ光源の提供を
目的とする。
It is an object of the present invention to provide an external resonator type semiconductor laser light source having a stable module structure in which optical axis alignment is easy and a narrow spectral line width can be obtained without lengthening the external resonator.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
に、この発明は、一方の端面に無反射膜1Aを施し、他
の端面に全反射膜1Bを施す半導体レーザ1と、半導体
レーザ1の無反射膜1Aを施した側の出射光12を入射
し、半導体レーザ1の全反射膜1Bと外部共振器を形成
する回折格子2と、前記外部共振器内に挿入し、共振し
ている光の一部を2方向に反射する反射率の低いビーム
スプリッタ3を備える。
In order to achieve this object, the present invention provides a semiconductor laser 1 having a non-reflection film 1A on one end face and a total reflection film 1B on the other end face, and a semiconductor laser 1. The emitted light 12 on the side provided with the non-reflective film 1A is incident, and the total reflection film 1B of the semiconductor laser 1 and the diffraction grating 2 forming an external resonator, and the diffraction grating 2 are inserted into the external resonator and resonate. A beam splitter 3 having a low reflectance that reflects a part of light in two directions is provided.

【0009】[0009]

【作用】次に、この発明による実施例の構成を図1に示
す。図1の3はビームスプリッタ、5Aと5Bは光アイ
ソレータである。図1で、半導体レーザ1の端面には無
反射膜1Aと全反射膜1Bが施され、半導体レーザから
の出力光を一方向のみに出射させる。半導体レーザ1
は、ファブリペロー型のものを使用し、LDドライブ回
路8により駆動する。
The structure of an embodiment according to the present invention is shown in FIG. In FIG. 1, 3 is a beam splitter, and 5A and 5B are optical isolators. In FIG. 1, a non-reflection film 1A and a total reflection film 1B are provided on the end surface of the semiconductor laser 1 so that the output light from the semiconductor laser is emitted in only one direction. Semiconductor laser 1
Is a Fabry-Perot type, and is driven by the LD drive circuit 8.

【0010】無反射膜1A側の出射光は、レンズ4によ
り平行光となり、ビームスプリッタ3を透過して回折格
子2に入射する。回折格子2はビームスプリッタ3の透
過光を反射し、反射光はビームスプリッタ3を再度透過
して半導体レーザ1に入射する。半導体レーザ1の全反
射膜1Bと回折格子2とで共振器が形成される。したが
って、ビームスプリッタ3は、共振器内に配置されてい
るものである。
The light emitted from the antireflection film 1A side is converted into parallel light by the lens 4, passes through the beam splitter 3 and is incident on the diffraction grating 2. The diffraction grating 2 reflects the light transmitted through the beam splitter 3, and the reflected light again passes through the beam splitter 3 and enters the semiconductor laser 1. A resonator is formed by the total reflection film 1B of the semiconductor laser 1 and the diffraction grating 2. Therefore, the beam splitter 3 is arranged in the resonator.

【0011】この時、回折格子2で選択された波長の光
のうち、共振器の位相条件が合った波長の光が共振す
る。回折格子2と半導体レーザ1の全反射面1Bは高反
射率であるため、共振器は急峻な周波数特性を持ち、急
峻な周波数特性を持つ光が半導体レーザ1に帰還され、
狭スペクトル線幅の光が得られる。
At this time, of the light of the wavelength selected by the diffraction grating 2, the light of the wavelength satisfying the phase condition of the resonator resonates. Since the diffraction grating 2 and the total reflection surface 1B of the semiconductor laser 1 have a high reflectance, the resonator has a steep frequency characteristic, and light having a steep frequency characteristic is fed back to the semiconductor laser 1.
Light with a narrow spectral linewidth is obtained.

【0012】ビームスプリッタ3に入射した光は、共振
器方向とほぼ直角に光路変換され、ビームスプリッタ3
の両方向に光を出射する。出射光は二出力となり、それ
ぞれ光アイソレータ5A・5Bに入射する。図1で、光
アイソレータ5A側の出射光は集光用レンズ6で集光さ
れ、光ファイバ7に入射して出力光となる。また、光ア
イソレータ5B側の出射光はモニター光として使用で
き、周波数安定化等に使用できる。
The light incident on the beam splitter 3 is subjected to an optical path change substantially at right angles to the resonator direction, and the beam splitter 3
The light is emitted in both directions. The emitted light has two outputs, and respectively enters the optical isolators 5A and 5B. In FIG. 1, the emitted light on the optical isolator 5A side is condensed by the condenser lens 6, enters the optical fiber 7, and becomes output light. The light emitted from the optical isolator 5B can be used as monitor light and can be used for frequency stabilization and the like.

【0013】角度調整機構9Aを備え、回折格子2を回
転させることにより、選択される波長が変化し、半導体
レーザの媒質利得範囲(約百数十nm)で波長可変がで
きる。また、平行移動機構10Aを備え、回折格子2を
共振器の光軸方向に平行移動すると、共振器の位相条件
が変化し、縦モード間隔の周波数(数GHz)領域で波
長可変できる。また、回折格子2に対し、角度調整機構
のドライブ回路9と平行移動機構のドライブ回路10を
制御回路11で同時に制御すると、位相連続な波長可変
が可能となる。
By providing the angle adjusting mechanism 9A and rotating the diffraction grating 2, the selected wavelength is changed, and the wavelength can be tuned within the medium gain range (about hundred and several tens nm) of the semiconductor laser. Further, when the parallel movement mechanism 10A is provided and the diffraction grating 2 is moved in parallel to the optical axis direction of the resonator, the phase condition of the resonator changes, and the wavelength can be tuned in the frequency (several GHz) region of the longitudinal mode interval. Further, when the drive circuit 9 of the angle adjusting mechanism and the drive circuit 10 of the parallel moving mechanism are simultaneously controlled by the control circuit 11 for the diffraction grating 2, phase continuous wavelength tunable becomes possible.

【0014】[0014]

【発明の効果】このように、この発明の外部共振器型半
導体レーザ光源は、半導体レーザからの出力光を一方向
のみに出射させるために、二つの平行光を半導体レーザ
の両側に作らなくてすみ、光軸合わせが簡単になる。ま
た、モジュール構造も共振器方向に長くならず、小型で
安定な構造が可能となる。さらに共振器の両反射率が高
いので、共振器のQが大きくなり、狭スペクトル線幅が
得られ、モニター光を備えた2出力の光源が得られる。
As described above, in the external cavity type semiconductor laser light source of the present invention, in order to emit the output light from the semiconductor laser in only one direction, it is necessary to produce two parallel lights on both sides of the semiconductor laser. Corner and optical axis alignment becomes easy. Further, the module structure does not become long in the resonator direction, and a small and stable structure can be realized. Furthermore, since both reflectances of the resonator are high, Q of the resonator is increased, a narrow spectral line width is obtained, and a two-output light source including monitor light is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of the present invention.

【図2】従来技術による外部共振器型半導体レーザ光源
の構成図である。
FIG. 2 is a configuration diagram of an external resonator type semiconductor laser light source according to a conventional technique.

【符号の説明】[Explanation of symbols]

1 半導体レーザ 1A 無反射膜 1B 全反射膜 2 回折格子 3 ビームスプリッタ 4 レンズ 5A・5B 光アイソレータ 6 集光用レンズ 7 光ファイバ 8 LDドライブ回路 9 角度調整機構のドライブ回路 9A 角度調整機構 10 平行移動機構のドライブ回路 10A 平行移動機構 11 制御回路 1 Semiconductor Laser 1A Non-Reflective Film 1B Total Reflection Film 2 Diffraction Grating 3 Beam Splitter 4 Lens 5A / 5B Optical Isolator 6 Condensing Lens 7 Optical Fiber 8 LD Drive Circuit 9 Drive Circuit of Angle Adjustment Mechanism 9A Angle Adjustment Mechanism 10 Parallel Movement Mechanism drive circuit 10A Parallel movement mechanism 11 Control circuit

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 一方の端面に無反射膜(1A)を施し、他の
端面に全反射膜(1B)を施す半導体レーザ(1) と、 半導体レーザ(1) の無反射膜(1A)を施した側の出射光(1
2)を入射し、半導体レーザ(1) の全反射膜(1B)と外部共
振器を形成する回折格子(2) と、 前記外部共振器内に挿入し、共振している光の1部を2
方向に反射する反射率の低いビームスプリッタ(3) を備
えることを特徴とする外部共振器型半導体レーザ光源。
1. A semiconductor laser (1) having a non-reflection film (1A) on one end face and a total reflection film (1B) on the other end face, and a non-reflection film (1A) for the semiconductor laser (1). Emitting light (1
2) and a diffraction grating (2) which forms an external resonator with the total reflection film (1B) of the semiconductor laser (1) and a part of light which is resonated by being inserted into the external resonator. Two
An external resonator type semiconductor laser light source, comprising a beam splitter (3) having a low reflectance for reflecting in a direction.
JP30929492A 1992-10-23 1992-10-23 External resonator type semiconductor laser light source Pending JPH06140717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30929492A JPH06140717A (en) 1992-10-23 1992-10-23 External resonator type semiconductor laser light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30929492A JPH06140717A (en) 1992-10-23 1992-10-23 External resonator type semiconductor laser light source

Publications (1)

Publication Number Publication Date
JPH06140717A true JPH06140717A (en) 1994-05-20

Family

ID=17991274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30929492A Pending JPH06140717A (en) 1992-10-23 1992-10-23 External resonator type semiconductor laser light source

Country Status (1)

Country Link
JP (1) JPH06140717A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0905490A1 (en) * 1998-04-21 1999-03-31 Hewlett-Packard Company Optical component tester
EP0911924A2 (en) * 1997-10-23 1999-04-28 Ando Electric Co., Ltd. External cavity laser type light source
EP0921614A1 (en) * 1997-12-09 1999-06-09 Hewlett-Packard Company Low noise and wide power range laser source
EP1005122A1 (en) * 1998-11-25 2000-05-31 Ando Electric Co., Ltd. External cavity type light source
US6072577A (en) * 1998-04-21 2000-06-06 Hewlett-Packard Company Noble gas detection and determination
EP1139525A2 (en) * 2000-03-30 2001-10-04 Ando Electric Co., Ltd. External resonator type laser light source

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0911924A2 (en) * 1997-10-23 1999-04-28 Ando Electric Co., Ltd. External cavity laser type light source
EP1475868A3 (en) * 1997-10-23 2005-07-20 Ando Electric Co., Ltd. External cavity laser
EP0911924A3 (en) * 1997-10-23 2000-04-26 Ando Electric Co., Ltd. External cavity laser type light source
EP1475868A2 (en) * 1997-10-23 2004-11-10 Ando Electric Co., Ltd. External cavity laser
US6404798B1 (en) 1997-12-09 2002-06-11 Agilent Technologies, Inc. Low noise and wide power range laser source
EP0921614A1 (en) * 1997-12-09 1999-06-09 Hewlett-Packard Company Low noise and wide power range laser source
US6072577A (en) * 1998-04-21 2000-06-06 Hewlett-Packard Company Noble gas detection and determination
EP0905490A1 (en) * 1998-04-21 1999-03-31 Hewlett-Packard Company Optical component tester
JP2000035376A (en) * 1998-04-21 2000-02-02 Hewlett Packard Co <Hp> Optical component tester
US6407869B1 (en) 1998-11-25 2002-06-18 Ando Electric Co., Ltd. External cavity type light source
EP1005122A1 (en) * 1998-11-25 2000-05-31 Ando Electric Co., Ltd. External cavity type light source
EP1139525A2 (en) * 2000-03-30 2001-10-04 Ando Electric Co., Ltd. External resonator type laser light source
EP1139525A3 (en) * 2000-03-30 2004-02-04 Ando Electric Co., Ltd. External resonator type laser light source

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