JPS6457635U - - Google Patents
Info
- Publication number
- JPS6457635U JPS6457635U JP15218787U JP15218787U JPS6457635U JP S6457635 U JPS6457635 U JP S6457635U JP 15218787 U JP15218787 U JP 15218787U JP 15218787 U JP15218787 U JP 15218787U JP S6457635 U JPS6457635 U JP S6457635U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- tube
- quartz tube
- covers
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218787U JPS6457635U (lv) | 1987-10-06 | 1987-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218787U JPS6457635U (lv) | 1987-10-06 | 1987-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457635U true JPS6457635U (lv) | 1989-04-10 |
Family
ID=31426889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15218787U Pending JPS6457635U (lv) | 1987-10-06 | 1987-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457635U (lv) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266335A (ja) * | 1985-05-21 | 1986-11-26 | Toshiba Ceramics Co Ltd | 半導体製造用炉芯管とその製造方法 |
| JPS6294925A (ja) * | 1985-10-21 | 1987-05-01 | Nec Corp | 熱処理装置 |
-
1987
- 1987-10-06 JP JP15218787U patent/JPS6457635U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266335A (ja) * | 1985-05-21 | 1986-11-26 | Toshiba Ceramics Co Ltd | 半導体製造用炉芯管とその製造方法 |
| JPS6294925A (ja) * | 1985-10-21 | 1987-05-01 | Nec Corp | 熱処理装置 |