JPS6455758A - Apparatus for producing information recording medium - Google Patents

Abstract

PURPOSE:To shorten the spacing between upper and lower substrates and to enhance working efficiency by providing a hollow guide shaft, a circular conical face which has holes on the side face and comes into contact with the balls projecting from the holes, a shaft having a circular cylindrical face which comes into contact with the inside cylinder of the guide shaft and a compression spring which supports the shaft. CONSTITUTION:The substrate 1 is supplied between the shaft 17 and the guide shaft 11. The interference of the balls 13 is released and the substrate 1 drops to the step part of the shaft 11 when the shaft 17 is lowered 18 to slightly push the tapered shaft 12. The shaft 17 is returned and an adhesive agent 3 is spin coated on the substrate 1. The upper substrate 2 is similarly supplied. The inside of a vessel is reduced in pressure and the substrate 2 is dropped onto the substrate 1 by lowering 18 of the shaft 17 and pushing of the tapered shaft 12. The atm. pressure is restored in the vessel and the sticking of the substrates is completed. The tapered shaft 12 is pushed by the shaft 17 to release the interference of the balls 13 and the substrates 1, 2 are lifted toward the upper part of the guide shaft 11, then the shaft 17 is returned upward and the tightly adhered substrates are taken out. Since the spacing between the upper and lower substrates is reduced to several mm according to this constitution, the volume of the reduced pressure vessel is reduced and the working efficiency is greatly improved.