JPS645440U - - Google Patents

Info

Publication number
JPS645440U
JPS645440U JP1987098461U JP9846187U JPS645440U JP S645440 U JPS645440 U JP S645440U JP 1987098461 U JP1987098461 U JP 1987098461U JP 9846187 U JP9846187 U JP 9846187U JP S645440 U JPS645440 U JP S645440U
Authority
JP
Japan
Prior art keywords
tank
cleaning
cleaning liquid
end connected
generating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987098461U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987098461U priority Critical patent/JPS645440U/ja
Publication of JPS645440U publication Critical patent/JPS645440U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1987098461U 1987-06-29 1987-06-29 Pending JPS645440U (US06174465-20010116-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987098461U JPS645440U (US06174465-20010116-C00003.png) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987098461U JPS645440U (US06174465-20010116-C00003.png) 1987-06-29 1987-06-29

Publications (1)

Publication Number Publication Date
JPS645440U true JPS645440U (US06174465-20010116-C00003.png) 1989-01-12

Family

ID=31324748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987098461U Pending JPS645440U (US06174465-20010116-C00003.png) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPS645440U (US06174465-20010116-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629271A (ja) * 1992-03-12 1994-02-04 Kyushu Electron Metal Co Ltd 半導体ウェーハの洗浄方法及びその装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178124A (ja) * 1984-09-26 1986-04-21 Oki Electric Ind Co Ltd 半導体ウエハの自動洗浄装置
JPS62123738A (ja) * 1985-11-25 1987-06-05 Hitachi Ltd ダイシング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178124A (ja) * 1984-09-26 1986-04-21 Oki Electric Ind Co Ltd 半導体ウエハの自動洗浄装置
JPS62123738A (ja) * 1985-11-25 1987-06-05 Hitachi Ltd ダイシング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629271A (ja) * 1992-03-12 1994-02-04 Kyushu Electron Metal Co Ltd 半導体ウェーハの洗浄方法及びその装置

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