JPS6454329U - - Google Patents

Info

Publication number

JPS6454329U

JPS6454329U JP14962187U JP14962187U JPS6454329U JP S6454329 U JPS6454329 U JP S6454329U JP 14962187 U JP14962187 U JP 14962187U JP 14962187 U JP14962187 U JP 14962187U JP S6454329 U JPS6454329 U JP S6454329U

Authority

JP

Japan

Prior art keywords

gas

region

compound semiconductor

film forming

reaction chamber

Prior art date

1987-09-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 150000001875 compounds Chemical class 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 6
• 238000001947 vapour-phase growth Methods 0.000 claims description 2
• 239000012808 vapor phase Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 230000015572 biosynthetic process Effects 0.000 description 1
• 150000004678 hydrides Chemical class 0.000 description 1
• 125000002524 organometallic group Chemical group 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)