JPS6454294U - - Google Patents
Info
- Publication number
- JPS6454294U JPS6454294U JP14620587U JP14620587U JPS6454294U JP S6454294 U JPS6454294 U JP S6454294U JP 14620587 U JP14620587 U JP 14620587U JP 14620587 U JP14620587 U JP 14620587U JP S6454294 U JPS6454294 U JP S6454294U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- nut
- quartz heater
- heater
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- -1 organic Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14620587U JPH0532956Y2 (enrdf_load_stackoverflow) | 1987-09-24 | 1987-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14620587U JPH0532956Y2 (enrdf_load_stackoverflow) | 1987-09-24 | 1987-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454294U true JPS6454294U (enrdf_load_stackoverflow) | 1989-04-04 |
| JPH0532956Y2 JPH0532956Y2 (enrdf_load_stackoverflow) | 1993-08-23 |
Family
ID=31415477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14620587U Expired - Lifetime JPH0532956Y2 (enrdf_load_stackoverflow) | 1987-09-24 | 1987-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0532956Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009088348A (ja) * | 2007-10-01 | 2009-04-23 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
-
1987
- 1987-09-24 JP JP14620587U patent/JPH0532956Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009088348A (ja) * | 2007-10-01 | 2009-04-23 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0532956Y2 (enrdf_load_stackoverflow) | 1993-08-23 |