JPS6451669U - - Google Patents

Info

Publication number
JPS6451669U
JPS6451669U JP14532987U JP14532987U JPS6451669U JP S6451669 U JPS6451669 U JP S6451669U JP 14532987 U JP14532987 U JP 14532987U JP 14532987 U JP14532987 U JP 14532987U JP S6451669 U JPS6451669 U JP S6451669U
Authority
JP
Japan
Prior art keywords
substrate
holder
claws
jig
legs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14532987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523584Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14532987U priority Critical patent/JPH0523584Y2/ja
Publication of JPS6451669U publication Critical patent/JPS6451669U/ja
Application granted granted Critical
Publication of JPH0523584Y2 publication Critical patent/JPH0523584Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14532987U 1987-09-25 1987-09-25 Expired - Lifetime JPH0523584Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14532987U JPH0523584Y2 (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14532987U JPH0523584Y2 (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Publications (2)

Publication Number Publication Date
JPS6451669U true JPS6451669U (enrdf_load_stackoverflow) 1989-03-30
JPH0523584Y2 JPH0523584Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31413817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14532987U Expired - Lifetime JPH0523584Y2 (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Country Status (1)

Country Link
JP (1) JPH0523584Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0523584Y2 (enrdf_load_stackoverflow) 1993-06-16

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