JPS6454294U - - Google Patents

Info

Publication number
JPS6454294U
JPS6454294U JP14620587U JP14620587U JPS6454294U JP S6454294 U JPS6454294 U JP S6454294U JP 14620587 U JP14620587 U JP 14620587U JP 14620587 U JP14620587 U JP 14620587U JP S6454294 U JPS6454294 U JP S6454294U
Authority
JP
Japan
Prior art keywords
quartz
nut
quartz heater
heater
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14620587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14620587U priority Critical patent/JPH0532956Y2/ja
Publication of JPS6454294U publication Critical patent/JPS6454294U/ja
Application granted granted Critical
Publication of JPH0532956Y2 publication Critical patent/JPH0532956Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Weting (AREA)
JP14620587U 1987-09-24 1987-09-24 Expired - Lifetime JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14620587U JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-24 1987-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14620587U JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-24 1987-09-24

Publications (2)

Publication Number Publication Date
JPS6454294U true JPS6454294U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-04
JPH0532956Y2 JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-23

Family

ID=31415477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14620587U Expired - Lifetime JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-24 1987-09-24

Country Status (1)

Country Link
JP (1) JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088348A (ja) * 2007-10-01 2009-04-23 Hitachi Kokusai Electric Inc 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088348A (ja) * 2007-10-01 2009-04-23 Hitachi Kokusai Electric Inc 半導体製造装置

Also Published As

Publication number Publication date
JPH0532956Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-23

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