JPS6453758U - - Google Patents
Info
- Publication number
- JPS6453758U JPS6453758U JP14962287U JP14962287U JPS6453758U JP S6453758 U JPS6453758 U JP S6453758U JP 14962287 U JP14962287 U JP 14962287U JP 14962287 U JP14962287 U JP 14962287U JP S6453758 U JPS6453758 U JP S6453758U
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- substrates
- substrate
- notch
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14962287U JPS6453758U (sv) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14962287U JPS6453758U (sv) | 1987-09-30 | 1987-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453758U true JPS6453758U (sv) | 1989-04-03 |
Family
ID=31422019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14962287U Pending JPS6453758U (sv) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453758U (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6132851A (ja) * | 1984-07-26 | 1986-02-15 | Toshiba Corp | アモルフアスシリコン感光体の製造方法 |
-
1987
- 1987-09-30 JP JP14962287U patent/JPS6453758U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6132851A (ja) * | 1984-07-26 | 1986-02-15 | Toshiba Corp | アモルフアスシリコン感光体の製造方法 |