JPS63128725U - - Google Patents
Info
- Publication number
- JPS63128725U JPS63128725U JP2034487U JP2034487U JPS63128725U JP S63128725 U JPS63128725 U JP S63128725U JP 2034487 U JP2034487 U JP 2034487U JP 2034487 U JP2034487 U JP 2034487U JP S63128725 U JPS63128725 U JP S63128725U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- hinge
- electrode plate
- insulating protective
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2034487U JPS63128725U (sv) | 1987-02-13 | 1987-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2034487U JPS63128725U (sv) | 1987-02-13 | 1987-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128725U true JPS63128725U (sv) | 1988-08-23 |
Family
ID=30815769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2034487U Pending JPS63128725U (sv) | 1987-02-13 | 1987-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128725U (sv) |
-
1987
- 1987-02-13 JP JP2034487U patent/JPS63128725U/ja active Pending