JPS6453755U - - Google Patents

Info

Publication number
JPS6453755U
JPS6453755U JP15060187U JP15060187U JPS6453755U JP S6453755 U JPS6453755 U JP S6453755U JP 15060187 U JP15060187 U JP 15060187U JP 15060187 U JP15060187 U JP 15060187U JP S6453755 U JPS6453755 U JP S6453755U
Authority
JP
Japan
Prior art keywords
substrate
holding mechanism
rotating
holder
donut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15060187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343232Y2 (US20100268047A1-20101021-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150601U priority Critical patent/JPH0343232Y2/ja
Publication of JPS6453755U publication Critical patent/JPS6453755U/ja
Application granted granted Critical
Publication of JPH0343232Y2 publication Critical patent/JPH0343232Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987150601U 1987-09-30 1987-09-30 Expired JPH0343232Y2 (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150601U JPH0343232Y2 (US20100268047A1-20101021-C00003.png) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150601U JPH0343232Y2 (US20100268047A1-20101021-C00003.png) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6453755U true JPS6453755U (US20100268047A1-20101021-C00003.png) 1989-04-03
JPH0343232Y2 JPH0343232Y2 (US20100268047A1-20101021-C00003.png) 1991-09-10

Family

ID=31423892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150601U Expired JPH0343232Y2 (US20100268047A1-20101021-C00003.png) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0343232Y2 (US20100268047A1-20101021-C00003.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598U (US20100268047A1-20101021-C00003.png) * 1979-06-16 1981-01-06
JPS61125170U (US20100268047A1-20101021-C00003.png) * 1984-10-12 1986-08-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598U (US20100268047A1-20101021-C00003.png) * 1979-06-16 1981-01-06
JPS61125170U (US20100268047A1-20101021-C00003.png) * 1984-10-12 1986-08-06

Also Published As

Publication number Publication date
JPH0343232Y2 (US20100268047A1-20101021-C00003.png) 1991-09-10

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