JPS6453549A - Drying of work - Google Patents
Drying of workInfo
- Publication number
- JPS6453549A JPS6453549A JP21119287A JP21119287A JPS6453549A JP S6453549 A JPS6453549 A JP S6453549A JP 21119287 A JP21119287 A JP 21119287A JP 21119287 A JP21119287 A JP 21119287A JP S6453549 A JPS6453549 A JP S6453549A
- Authority
- JP
- Japan
- Prior art keywords
- work
- water
- pure water
- warm pure
- dried
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE:To dry a work by its own heat simultaneously with its pulling up by a method wherein the work to be dried is immersed in warm pure water and the work is pulled up slowly at a speed at which the surface of the water does not wave while steam near the surface of the water is being discharged in a horizontal direction. CONSTITUTION:A work 1 is transferred to a drying chamber; it is immersed in warm pure water 2 where an impurity has been removed and whose temperature has been raised to a prescribed temperature. The warm pure water 2 is heated to a prescribed temperature by using a heater 5 inside a heating tank 4; after that, the water is fed to a warm pure water tank 3 by using a pump 6. Then, the work 1 immersed in the warm pure water 2 is pulled up from the warm pure water 2 at a speed at which the surface of the water does not wave and at which the work 1 can be dried by its own heat simultaneously with its pulling up while steam near the surface of the water is being discharged in a horizontal direction by means of suction or the like. By this setup, the work 1 is dried successively from a pulled-up part; it is dried uniformly; a stain due to drying uneveness is not caused.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62211192A JP2610441B2 (en) | 1987-08-25 | 1987-08-25 | Work drying method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62211192A JP2610441B2 (en) | 1987-08-25 | 1987-08-25 | Work drying method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6453549A true JPS6453549A (en) | 1989-03-01 |
JP2610441B2 JP2610441B2 (en) | 1997-05-14 |
Family
ID=16601913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62211192A Expired - Fee Related JP2610441B2 (en) | 1987-08-25 | 1987-08-25 | Work drying method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2610441B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0566972U (en) * | 1992-02-21 | 1993-09-03 | 大日本スクリーン製造株式会社 | Substrate pure water pull-up drying device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002222790A (en) * | 2001-01-24 | 2002-08-09 | Speedfam Clean System Co Ltd | Drying method of work |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58207376A (en) * | 1982-05-27 | 1983-12-02 | Hitachi Ltd | Method and device for treatment of base board |
JPS6367735A (en) * | 1986-09-09 | 1988-03-26 | Texas Instr Japan Ltd | Substrate dry and substrate container |
-
1987
- 1987-08-25 JP JP62211192A patent/JP2610441B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58207376A (en) * | 1982-05-27 | 1983-12-02 | Hitachi Ltd | Method and device for treatment of base board |
JPS6367735A (en) * | 1986-09-09 | 1988-03-26 | Texas Instr Japan Ltd | Substrate dry and substrate container |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0566972U (en) * | 1992-02-21 | 1993-09-03 | 大日本スクリーン製造株式会社 | Substrate pure water pull-up drying device |
Also Published As
Publication number | Publication date |
---|---|
JP2610441B2 (en) | 1997-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |