JPS6453131A - Particle detecting device - Google Patents
Particle detecting deviceInfo
- Publication number
- JPS6453131A JPS6453131A JP62209537A JP20953787A JPS6453131A JP S6453131 A JPS6453131 A JP S6453131A JP 62209537 A JP62209537 A JP 62209537A JP 20953787 A JP20953787 A JP 20953787A JP S6453131 A JPS6453131 A JP S6453131A
- Authority
- JP
- Japan
- Prior art keywords
- light
- laser beam
- beam light
- area
- quantity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title 1
- 230000007812 deficiency Effects 0.000 abstract 1
- 230000014509 gene expression Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE:To increase the lateral width of projection light and to uniform the light quantity distribution in an area to be detected by providing a spatial filter in a specific shape which passes only sheet-shaped beam light and a reflecting mirror which has a specific reflection factor. CONSTITUTION:The quantity I(x,y) of laser beam light l2 emitted by a projection optical system 12 is shown by an equation I [where K is a proportional constant and Wx and Wy are the 1/e<2> width (e: natural number) of the beam light l2] and the light quantity distribution of laser beam light l3 passed through the spatial filter 19 in the specific shape is shown by expressions II wherein diffraction is ignored. Then when the laser beam l3 is reflected by the reflecting mirror 18 whose reflection factor R(X) is distributed as shown by an equation III, the deficiency of the light quantity distribution of laser beam light l4 is corrected and the quantity of light per unit area in the area 16 to be detected is made uniform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62209537A JPS6453131A (en) | 1987-08-24 | 1987-08-24 | Particle detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62209537A JPS6453131A (en) | 1987-08-24 | 1987-08-24 | Particle detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453131A true JPS6453131A (en) | 1989-03-01 |
Family
ID=16574446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62209537A Pending JPS6453131A (en) | 1987-08-24 | 1987-08-24 | Particle detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453131A (en) |
-
1987
- 1987-08-24 JP JP62209537A patent/JPS6453131A/en active Pending
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