JPS6453076A - High vacuum pump protecting system in high vacuum exhaust system - Google Patents

High vacuum pump protecting system in high vacuum exhaust system

Info

Publication number
JPS6453076A
JPS6453076A JP20586087A JP20586087A JPS6453076A JP S6453076 A JPS6453076 A JP S6453076A JP 20586087 A JP20586087 A JP 20586087A JP 20586087 A JP20586087 A JP 20586087A JP S6453076 A JPS6453076 A JP S6453076A
Authority
JP
Japan
Prior art keywords
gate valve
sample
chamber
high vacuum
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20586087A
Other languages
English (en)
Other versions
JP2503234B2 (ja
Inventor
Haruo Hirano
Nagamitsu Yoshimura
Yoshinori Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62205860A priority Critical patent/JP2503234B2/ja
Publication of JPS6453076A publication Critical patent/JPS6453076A/ja
Application granted granted Critical
Publication of JP2503234B2 publication Critical patent/JP2503234B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP62205860A 1987-08-19 1987-08-19 高真空排気制御装置 Expired - Fee Related JP2503234B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62205860A JP2503234B2 (ja) 1987-08-19 1987-08-19 高真空排気制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62205860A JP2503234B2 (ja) 1987-08-19 1987-08-19 高真空排気制御装置

Publications (2)

Publication Number Publication Date
JPS6453076A true JPS6453076A (en) 1989-03-01
JP2503234B2 JP2503234B2 (ja) 1996-06-05

Family

ID=16513914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62205860A Expired - Fee Related JP2503234B2 (ja) 1987-08-19 1987-08-19 高真空排気制御装置

Country Status (1)

Country Link
JP (1) JP2503234B2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168255U (ja) * 1984-04-17 1985-11-08 日本電子株式会社 真空排気制御装置
JPS6224063U (ja) * 1985-07-26 1987-02-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168255U (ja) * 1984-04-17 1985-11-08 日本電子株式会社 真空排気制御装置
JPS6224063U (ja) * 1985-07-26 1987-02-13

Also Published As

Publication number Publication date
JP2503234B2 (ja) 1996-06-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees