JPS6453076A - High vacuum pump protecting system in high vacuum exhaust system - Google Patents
High vacuum pump protecting system in high vacuum exhaust systemInfo
- Publication number
- JPS6453076A JPS6453076A JP20586087A JP20586087A JPS6453076A JP S6453076 A JPS6453076 A JP S6453076A JP 20586087 A JP20586087 A JP 20586087A JP 20586087 A JP20586087 A JP 20586087A JP S6453076 A JPS6453076 A JP S6453076A
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- sample
- chamber
- high vacuum
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62205860A JP2503234B2 (ja) | 1987-08-19 | 1987-08-19 | 高真空排気制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62205860A JP2503234B2 (ja) | 1987-08-19 | 1987-08-19 | 高真空排気制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6453076A true JPS6453076A (en) | 1989-03-01 |
JP2503234B2 JP2503234B2 (ja) | 1996-06-05 |
Family
ID=16513914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62205860A Expired - Fee Related JP2503234B2 (ja) | 1987-08-19 | 1987-08-19 | 高真空排気制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2503234B2 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60168255U (ja) * | 1984-04-17 | 1985-11-08 | 日本電子株式会社 | 真空排気制御装置 |
JPS6224063U (ja) * | 1985-07-26 | 1987-02-13 |
-
1987
- 1987-08-19 JP JP62205860A patent/JP2503234B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60168255U (ja) * | 1984-04-17 | 1985-11-08 | 日本電子株式会社 | 真空排気制御装置 |
JPS6224063U (ja) * | 1985-07-26 | 1987-02-13 |
Also Published As
Publication number | Publication date |
---|---|
JP2503234B2 (ja) | 1996-06-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |