JPS6452594U - - Google Patents

Info

Publication number
JPS6452594U
JPS6452594U JP14799587U JP14799587U JPS6452594U JP S6452594 U JPS6452594 U JP S6452594U JP 14799587 U JP14799587 U JP 14799587U JP 14799587 U JP14799587 U JP 14799587U JP S6452594 U JPS6452594 U JP S6452594U
Authority
JP
Japan
Prior art keywords
belt
roller
wafer
cleaning liquid
support surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14799587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14799587U priority Critical patent/JPS6452594U/ja
Publication of JPS6452594U publication Critical patent/JPS6452594U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP14799587U 1987-09-28 1987-09-28 Pending JPS6452594U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14799587U JPS6452594U (enrdf_load_stackoverflow) 1987-09-28 1987-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14799587U JPS6452594U (enrdf_load_stackoverflow) 1987-09-28 1987-09-28

Publications (1)

Publication Number Publication Date
JPS6452594U true JPS6452594U (enrdf_load_stackoverflow) 1989-03-31

Family

ID=31418909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14799587U Pending JPS6452594U (enrdf_load_stackoverflow) 1987-09-28 1987-09-28

Country Status (1)

Country Link
JP (1) JPS6452594U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010275026A (ja) * 2009-05-26 2010-12-09 Toppan Printing Co Ltd 枚葉基板搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010275026A (ja) * 2009-05-26 2010-12-09 Toppan Printing Co Ltd 枚葉基板搬送装置

Similar Documents

Publication Publication Date Title
JPS6452594U (enrdf_load_stackoverflow)
JPH081103A (ja) 板状体の洗浄装置
JP2001315463A (ja) 書籍表面清浄装置
JP2878931B2 (ja) 半導体ウエハの清浄化方法及びその装置
JPH0213019U (enrdf_load_stackoverflow)
JPH0172517U (enrdf_load_stackoverflow)
JP2578960B2 (ja) ブラシ洗浄装置
JPS6323114B2 (enrdf_load_stackoverflow)
JPH072066Y2 (ja) コーティング液供給装置
JPH0252436U (enrdf_load_stackoverflow)
JPH01130163U (enrdf_load_stackoverflow)
JPH0568945U (ja) ベルトコンベア装置
JPS62113147U (enrdf_load_stackoverflow)
JPH0977250A (ja) Ｓｍｃ搬送用コンベア
JPH023825U (enrdf_load_stackoverflow)
JPH0343995U (enrdf_load_stackoverflow)
JPS63151454U (enrdf_load_stackoverflow)
JPH02142448U (enrdf_load_stackoverflow)
JPH03125720U (enrdf_load_stackoverflow)
JPH0319791B2 (enrdf_load_stackoverflow)
JPH02110646U (enrdf_load_stackoverflow)
JPS62128013U (enrdf_load_stackoverflow)
JPH11216649A (ja) バリ取り装置及びバリ取り方法
JPH0453735U (enrdf_load_stackoverflow)
JPH0240486U (enrdf_load_stackoverflow)