JPS6452243U - - Google Patents

Info

Publication number

JPS6452243U

JPS6452243U JP14635787U JP14635787U JPS6452243U JP S6452243 U JPS6452243 U JP S6452243U JP 14635787 U JP14635787 U JP 14635787U JP 14635787 U JP14635787 U JP 14635787U JP S6452243 U JPS6452243 U JP S6452243U

Authority

JP

Japan

Prior art keywords

insulating film

fuse element

film

cut

semiconductor device

Prior art date

1987-09-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000005530 etching Methods 0.000 claims description 2
• 239000011229 interlayer Substances 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 238000002161 passivation Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1