JPS6452240U - - Google Patents

Info

Publication number
JPS6452240U
JPS6452240U JP14721987U JP14721987U JPS6452240U JP S6452240 U JPS6452240 U JP S6452240U JP 14721987 U JP14721987 U JP 14721987U JP 14721987 U JP14721987 U JP 14721987U JP S6452240 U JPS6452240 U JP S6452240U
Authority
JP
Japan
Prior art keywords
arm
semiconductor substrate
horizontally rotatable
drive motor
explanatory diagram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14721987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14721987U priority Critical patent/JPS6452240U/ja
Publication of JPS6452240U publication Critical patent/JPS6452240U/ja
Pending legal-status Critical Current

Links

JP14721987U 1987-09-26 1987-09-26 Pending JPS6452240U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14721987U JPS6452240U (US20080293856A1-20081127-C00150.png) 1987-09-26 1987-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14721987U JPS6452240U (US20080293856A1-20081127-C00150.png) 1987-09-26 1987-09-26

Publications (1)

Publication Number Publication Date
JPS6452240U true JPS6452240U (US20080293856A1-20081127-C00150.png) 1989-03-31

Family

ID=31417419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14721987U Pending JPS6452240U (US20080293856A1-20081127-C00150.png) 1987-09-26 1987-09-26

Country Status (1)

Country Link
JP (1) JPS6452240U (US20080293856A1-20081127-C00150.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0969549A (ja) * 1995-08-31 1997-03-11 Shibaura Eng Works Co Ltd ロ−デイング装置
JP2001009765A (ja) * 1999-06-28 2001-01-16 Hirata Corp 昇降ユニット及びロボット装置
JP2009028847A (ja) * 2007-07-27 2009-02-12 Daihen Corp 搬送装置
JP2013254985A (ja) * 2013-09-09 2013-12-19 Yaskawa Electric Corp 基板処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0969549A (ja) * 1995-08-31 1997-03-11 Shibaura Eng Works Co Ltd ロ−デイング装置
JP2001009765A (ja) * 1999-06-28 2001-01-16 Hirata Corp 昇降ユニット及びロボット装置
JP2009028847A (ja) * 2007-07-27 2009-02-12 Daihen Corp 搬送装置
JP2013254985A (ja) * 2013-09-09 2013-12-19 Yaskawa Electric Corp 基板処理装置

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