JPS6451259U - - Google Patents

Info

Publication number
JPS6451259U
JPS6451259U JP14497887U JP14497887U JPS6451259U JP S6451259 U JPS6451259 U JP S6451259U JP 14497887 U JP14497887 U JP 14497887U JP 14497887 U JP14497887 U JP 14497887U JP S6451259 U JPS6451259 U JP S6451259U
Authority
JP
Japan
Prior art keywords
inductively coupled
coupled plasma
frequency inductively
chamber
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14497887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14497887U priority Critical patent/JPS6451259U/ja
Publication of JPS6451259U publication Critical patent/JPS6451259U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP14497887U 1987-09-22 1987-09-22 Pending JPS6451259U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14497887U JPS6451259U (enExample) 1987-09-22 1987-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14497887U JPS6451259U (enExample) 1987-09-22 1987-09-22

Publications (1)

Publication Number Publication Date
JPS6451259U true JPS6451259U (enExample) 1989-03-29

Family

ID=31413163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14497887U Pending JPS6451259U (enExample) 1987-09-22 1987-09-22

Country Status (1)

Country Link
JP (1) JPS6451259U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177850A (ja) * 1986-01-31 1987-08-04 Yokogawa Electric Corp 誘導結合プラズマ・質量分析計
JPS62213057A (ja) * 1986-03-14 1987-09-18 Yokogawa Electric Corp 高周波誘導結合プラズマ・質量分析計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177850A (ja) * 1986-01-31 1987-08-04 Yokogawa Electric Corp 誘導結合プラズマ・質量分析計
JPS62213057A (ja) * 1986-03-14 1987-09-18 Yokogawa Electric Corp 高周波誘導結合プラズマ・質量分析計

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