JPS6451259U - - Google Patents
Info
- Publication number
- JPS6451259U JPS6451259U JP14497887U JP14497887U JPS6451259U JP S6451259 U JPS6451259 U JP S6451259U JP 14497887 U JP14497887 U JP 14497887U JP 14497887 U JP14497887 U JP 14497887U JP S6451259 U JPS6451259 U JP S6451259U
- Authority
- JP
- Japan
- Prior art keywords
- inductively coupled
- coupled plasma
- frequency inductively
- chamber
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の要部構成断面図、図中
、第２図は本考案の他の実施例の要部構成断面図
、第３図は従来例の構成説明図、第４図は従来例
の要部構成断面図である。
１……プラズマトーチ、１ａ……プラズマトー
チの内室、１ｂ……プラズマトーチの外室、１ｃ
……プラズマトーチの最外室、１ｄ……プラズマ
トーチの外壁、３……アルゴンガス供給源、４ａ
……レーザ光源、５……試料、６……高周波誘導
コイル、７……高周波誘導結合プラズマ、８……
ノズル、９……スキマー、１１……フオアチヤン
バー、１３……センターチヤンバー、１６……マ
スフイルタ、１７……リアチヤンバー、２０……
信号処理部、２１……トーチボツクス、２２……
ラツパ状の突出部、２３……閉塞板、２４……パ
ージ管。
Fig. 1 is a cross-sectional view of the main part of an embodiment of the present invention, Fig. 2 is a cross-sectional view of the main part of another embodiment of the present invention, Fig. 3 is an explanatory view of the structure of a conventional example, and Fig. 4 1 is a sectional view of a main part configuration of a conventional example. 1...Plasma torch, 1a...Inner chamber of plasma torch, 1b...Outer chamber of plasma torch, 1c
...Outermost chamber of the plasma torch, 1d...Outer wall of the plasma torch, 3...Argon gas supply source, 4a
... Laser light source, 5 ... Sample, 6 ... High frequency induction coil, 7 ... High frequency inductively coupled plasma, 8 ...
Nozzle, 9... Skimmer, 11... Front chamber, 13... Center chamber, 16... Mass filter, 17... Rear chamber, 20...
Signal processing unit, 21... Torch box, 22...
Lump-shaped protrusion, 23... blocking plate, 24... purge pipe.
Claims (1)
生じたイオンを真空中に導入しイオン光学系を通
して質量分析計検出器に導いて検出することによ
り前記試料中の被測定元素を分析する分析計にお
いて、前記高周波誘導結合プラズマを生じさせる
プラズマトーチを内室、外室、及び最外室からな
る三重管構造にすると共に、該外室の外壁をラツ
パ状に形成することにより、前記プラズマトーチ
での空気巻き込みを防止することを特徴とする高
周波誘導結合プラズマ質量分析計。 In an analyzer that analyzes the element to be measured in the sample by exciting the sample using high-frequency inductively coupled plasma and introducing the generated ions into a vacuum and guiding them to a mass spectrometer detector through an ion optical system and detecting them, The plasma torch that generates the high-frequency inductively coupled plasma has a triple tube structure consisting of an inner chamber, an outer chamber, and an outermost chamber, and the outer wall of the outer chamber is formed in a round shape, so that the plasma torch generates the high-frequency inductively coupled plasma. A high frequency inductively coupled plasma mass spectrometer that is characterized by preventing entrainment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14497887U JPS6451259U (en) | 1987-09-22 | 1987-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14497887U JPS6451259U (en) | 1987-09-22 | 1987-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451259U true JPS6451259U (en) | 1989-03-29 |
Family
ID=31413163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14497887U Pending JPS6451259U (en) | 1987-09-22 | 1987-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451259U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177850A (en) * | 1986-01-31 | 1987-08-04 | Yokogawa Electric Corp | Inductive coupling plasma/mass spectrometer |
| JPS62213057A (en) * | 1986-03-14 | 1987-09-18 | Yokogawa Electric Corp | Mass spectrometer with high frequency inductive coupling plasma |
-
1987
- 1987-09-22 JP JP14497887U patent/JPS6451259U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177850A (en) * | 1986-01-31 | 1987-08-04 | Yokogawa Electric Corp | Inductive coupling plasma/mass spectrometer |
| JPS62213057A (en) * | 1986-03-14 | 1987-09-18 | Yokogawa Electric Corp | Mass spectrometer with high frequency inductive coupling plasma |
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