JPS645050A - Capacitor and formation thereof - Google Patents

Capacitor and formation thereof

Info

Publication number
JPS645050A
JPS645050A JP62159595A JP15959587A JPS645050A JP S645050 A JPS645050 A JP S645050A JP 62159595 A JP62159595 A JP 62159595A JP 15959587 A JP15959587 A JP 15959587A JP S645050 A JPS645050 A JP S645050A
Authority
JP
Japan
Prior art keywords
electrode
capacitor
dielectric
conductor
comparison
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62159595A
Other languages
Japanese (ja)
Inventor
Shinpei Iijima
Toshiyuki Mine
Atsushi Hiraiwa
Jiro Yoshigami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62159595A priority Critical patent/JPS645050A/en
Publication of JPS645050A publication Critical patent/JPS645050A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To provide a capacitor having a larger capacity in comparison with a conventional one having the same area and to improve the reliability of an LSI device, by forming an extremely thin film having high dielectric strength and high reliability in a well controlled manner, for providing a capacitor insulating film for a dynamic RAM. CONSTITUTION:A capacitor is composed of a first electrode 30 of a conductor or semiconductor, a dielectric on the electrode 30, and a second electrode 60 formed of a conductor or semiconductor on the dielectric. The dielectric consists of an Si nitride film 40 which is provided by nitriding the surface of the electrode 30 and an oxynitride film 50 composed of N and O. The electrode 30 is formed of highly doped polycrystalline Si, while the electrode 60 is formed of polycrystalline Si or a silicide of a metal. According to this arrangement, the capacitor is allowed to have a larger capacity in comparison with conventional capacitors having the same area. Thus, the reli ability of an LSI device can be improved.
JP62159595A 1987-06-29 1987-06-29 Capacitor and formation thereof Pending JPS645050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62159595A JPS645050A (en) 1987-06-29 1987-06-29 Capacitor and formation thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62159595A JPS645050A (en) 1987-06-29 1987-06-29 Capacitor and formation thereof

Publications (1)

Publication Number Publication Date
JPS645050A true JPS645050A (en) 1989-01-10

Family

ID=15697134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62159595A Pending JPS645050A (en) 1987-06-29 1987-06-29 Capacitor and formation thereof

Country Status (1)

Country Link
JP (1) JPS645050A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5132810A (en) * 1989-05-29 1992-07-21 Dainnippon Screen Mfg. Co., Ltd. Flat bed scanning type image reader

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5132810A (en) * 1989-05-29 1992-07-21 Dainnippon Screen Mfg. Co., Ltd. Flat bed scanning type image reader

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