JPS645029A - Appearance inspection equipment - Google Patents
Appearance inspection equipmentInfo
- Publication number
- JPS645029A JPS645029A JP16179587A JP16179587A JPS645029A JP S645029 A JPS645029 A JP S645029A JP 16179587 A JP16179587 A JP 16179587A JP 16179587 A JP16179587 A JP 16179587A JP S645029 A JPS645029 A JP S645029A
- Authority
- JP
- Japan
- Prior art keywords
- image
- inspected
- lead
- lead pins
- camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To recognize the shape of an object to be inspected, such as the up ward bend and the downward bend of a lead pin, by taking the image of the object to be inspected with a camera, and detecting the length of the shadow of the object to be inspected from a image projection plate. CONSTITUTION:Lead pins 11 are irradiated with a light source 3 of direct light, and the shadows are guided to a CCD camera 2 by adjusting an image projec tion plate 6 capable of rocking. The camera 2 detects the images of the upper surface of the lead pins 11 of a semiconductor device 1 and the shadows of the lead pins 11. Based on the detected images, the pitch, the width and the number of the lead pins are recognized. The shadow of a lead pin 10 in the failure state of upward bend is represented by an image 10a. As the area of its projection image is large, it is compared with the image of the lead pin 11 in normal state by the binary level image processing and can be recognized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16179587A JPS645029A (en) | 1987-06-29 | 1987-06-29 | Appearance inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16179587A JPS645029A (en) | 1987-06-29 | 1987-06-29 | Appearance inspection equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS645029A true JPS645029A (en) | 1989-01-10 |
Family
ID=15742055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16179587A Pending JPS645029A (en) | 1987-06-29 | 1987-06-29 | Appearance inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS645029A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0257905A (en) * | 1988-08-12 | 1990-02-27 | Nec Kyushu Ltd | Detector of degree of evenness of j-lead ic package |
JPH0548347U (en) * | 1991-11-28 | 1993-06-25 | 株式会社アドバンテスト | IC imaging stage |
-
1987
- 1987-06-29 JP JP16179587A patent/JPS645029A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0257905A (en) * | 1988-08-12 | 1990-02-27 | Nec Kyushu Ltd | Detector of degree of evenness of j-lead ic package |
JPH0548347U (en) * | 1991-11-28 | 1993-06-25 | 株式会社アドバンテスト | IC imaging stage |
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