JPS6449392U - - Google Patents

Info

Publication number
JPS6449392U
JPS6449392U JP1987142415U JP14241587U JPS6449392U JP S6449392 U JPS6449392 U JP S6449392U JP 1987142415 U JP1987142415 U JP 1987142415U JP 14241587 U JP14241587 U JP 14241587U JP S6449392 U JPS6449392 U JP S6449392U
Authority
JP
Japan
Prior art keywords
pressurized gas
valve
laser
flow rate
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987142415U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987142415U priority Critical patent/JPS6449392U/ja
Publication of JPS6449392U publication Critical patent/JPS6449392U/ja
Pending legal-status Critical Current

Links

JP1987142415U 1987-09-18 1987-09-18 Pending JPS6449392U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987142415U JPS6449392U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-18 1987-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987142415U JPS6449392U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-18 1987-09-18

Publications (1)

Publication Number Publication Date
JPS6449392U true JPS6449392U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-27

Family

ID=31408347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987142415U Pending JPS6449392U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-18 1987-09-18

Country Status (1)

Country Link
JP (1) JPS6449392U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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