JPS6448861U - - Google Patents
Info
- Publication number
- JPS6448861U JPS6448861U JP14296087U JP14296087U JPS6448861U JP S6448861 U JPS6448861 U JP S6448861U JP 14296087 U JP14296087 U JP 14296087U JP 14296087 U JP14296087 U JP 14296087U JP S6448861 U JPS6448861 U JP S6448861U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- insulating member
- metal
- dimensional drive
- piezo element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 230000005641 tunneling Effects 0.000 claims 2
- 238000001465 metallisation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14296087U JPS6448861U (enrdf_load_stackoverflow) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14296087U JPS6448861U (enrdf_load_stackoverflow) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448861U true JPS6448861U (enrdf_load_stackoverflow) | 1989-03-27 |
Family
ID=31409350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14296087U Pending JPS6448861U (enrdf_load_stackoverflow) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448861U (enrdf_load_stackoverflow) |
-
1987
- 1987-09-21 JP JP14296087U patent/JPS6448861U/ja active Pending
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