JPS6448439A - Mounting structure of probing card - Google Patents

Mounting structure of probing card

Info

Publication number
JPS6448439A
JPS6448439A JP62206036A JP20603687A JPS6448439A JP S6448439 A JPS6448439 A JP S6448439A JP 62206036 A JP62206036 A JP 62206036A JP 20603687 A JP20603687 A JP 20603687A JP S6448439 A JPS6448439 A JP S6448439A
Authority
JP
Japan
Prior art keywords
probing
card
ring
exchanging
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62206036A
Other languages
Japanese (ja)
Other versions
JPH0744205B2 (en
Inventor
Isao Kasamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62206036A priority Critical patent/JPH0744205B2/en
Publication of JPS6448439A publication Critical patent/JPS6448439A/en
Publication of JPH0744205B2 publication Critical patent/JPH0744205B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To exchange various probing cards easily, and to exchange the probing cards automatically by engaging a terminal pin for the probing card with a socket section for a probing-card exchanging ring. CONSTITUTION:Terminal pins 21 for a probing card are interlinked with one terminal sections such as socket sections 12 in a probing-card exchanging ring 10. That is, the probing-card exchanging ring 10 is mounted previously to the probing card, and both the ring 10 and the probing card are applied integrally to a probing-card automatic exchanging system prober. Consequently, the probing card and the probing-card exchanging ring 10 are carried integrally by an automatic exchanging means such as a robot arm, the other terminal sections 11 for the probing-card exchanging ring 10 and a pogo-pin 32 on the probing device side can be connected, and the mounting structure can be made to correspond to various probing cards.
JP62206036A 1987-08-18 1987-08-18 Probe card mounting method Expired - Fee Related JPH0744205B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62206036A JPH0744205B2 (en) 1987-08-18 1987-08-18 Probe card mounting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62206036A JPH0744205B2 (en) 1987-08-18 1987-08-18 Probe card mounting method

Publications (2)

Publication Number Publication Date
JPS6448439A true JPS6448439A (en) 1989-02-22
JPH0744205B2 JPH0744205B2 (en) 1995-05-15

Family

ID=16516836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62206036A Expired - Fee Related JPH0744205B2 (en) 1987-08-18 1987-08-18 Probe card mounting method

Country Status (1)

Country Link
JP (1) JPH0744205B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276018A (en) * 1991-03-01 1992-10-01 Kobe Steel Ltd Manufacture of door guard bar excellent in collapse resistant property
JPH0513046U (en) * 1991-07-29 1993-02-19 山形日本電気株式会社 Semiconductor probe board inspection device
JP2000346877A (en) * 1999-04-02 2000-12-15 Mitsubishi Materials Corp Contact probe and its manufacture, and probe device using the contact probe, and its manufacture

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192441U (en) * 1984-05-31 1985-12-20 富士通株式会社 Integrated circuit testing equipment
JPS6265435A (en) * 1985-09-18 1987-03-24 Fujitsu Ltd Device for testing wafer
JPS6286739A (en) * 1985-10-11 1987-04-21 Nec Corp Probe card

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192441U (en) * 1984-05-31 1985-12-20 富士通株式会社 Integrated circuit testing equipment
JPS6265435A (en) * 1985-09-18 1987-03-24 Fujitsu Ltd Device for testing wafer
JPS6286739A (en) * 1985-10-11 1987-04-21 Nec Corp Probe card

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276018A (en) * 1991-03-01 1992-10-01 Kobe Steel Ltd Manufacture of door guard bar excellent in collapse resistant property
JPH0513046U (en) * 1991-07-29 1993-02-19 山形日本電気株式会社 Semiconductor probe board inspection device
JP2000346877A (en) * 1999-04-02 2000-12-15 Mitsubishi Materials Corp Contact probe and its manufacture, and probe device using the contact probe, and its manufacture

Also Published As

Publication number Publication date
JPH0744205B2 (en) 1995-05-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees