JPS6448439A - Mounting structure of probing card - Google Patents
Mounting structure of probing cardInfo
- Publication number
- JPS6448439A JPS6448439A JP62206036A JP20603687A JPS6448439A JP S6448439 A JPS6448439 A JP S6448439A JP 62206036 A JP62206036 A JP 62206036A JP 20603687 A JP20603687 A JP 20603687A JP S6448439 A JPS6448439 A JP S6448439A
- Authority
- JP
- Japan
- Prior art keywords
- probing
- card
- ring
- exchanging
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE:To exchange various probing cards easily, and to exchange the probing cards automatically by engaging a terminal pin for the probing card with a socket section for a probing-card exchanging ring. CONSTITUTION:Terminal pins 21 for a probing card are interlinked with one terminal sections such as socket sections 12 in a probing-card exchanging ring 10. That is, the probing-card exchanging ring 10 is mounted previously to the probing card, and both the ring 10 and the probing card are applied integrally to a probing-card automatic exchanging system prober. Consequently, the probing card and the probing-card exchanging ring 10 are carried integrally by an automatic exchanging means such as a robot arm, the other terminal sections 11 for the probing-card exchanging ring 10 and a pogo-pin 32 on the probing device side can be connected, and the mounting structure can be made to correspond to various probing cards.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206036A JPH0744205B2 (en) | 1987-08-18 | 1987-08-18 | Probe card mounting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206036A JPH0744205B2 (en) | 1987-08-18 | 1987-08-18 | Probe card mounting method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6448439A true JPS6448439A (en) | 1989-02-22 |
JPH0744205B2 JPH0744205B2 (en) | 1995-05-15 |
Family
ID=16516836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62206036A Expired - Fee Related JPH0744205B2 (en) | 1987-08-18 | 1987-08-18 | Probe card mounting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0744205B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04276018A (en) * | 1991-03-01 | 1992-10-01 | Kobe Steel Ltd | Manufacture of door guard bar excellent in collapse resistant property |
JPH0513046U (en) * | 1991-07-29 | 1993-02-19 | 山形日本電気株式会社 | Semiconductor probe board inspection device |
JP2000346877A (en) * | 1999-04-02 | 2000-12-15 | Mitsubishi Materials Corp | Contact probe and its manufacture, and probe device using the contact probe, and its manufacture |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60192441U (en) * | 1984-05-31 | 1985-12-20 | 富士通株式会社 | Integrated circuit testing equipment |
JPS6265435A (en) * | 1985-09-18 | 1987-03-24 | Fujitsu Ltd | Device for testing wafer |
JPS6286739A (en) * | 1985-10-11 | 1987-04-21 | Nec Corp | Probe card |
-
1987
- 1987-08-18 JP JP62206036A patent/JPH0744205B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60192441U (en) * | 1984-05-31 | 1985-12-20 | 富士通株式会社 | Integrated circuit testing equipment |
JPS6265435A (en) * | 1985-09-18 | 1987-03-24 | Fujitsu Ltd | Device for testing wafer |
JPS6286739A (en) * | 1985-10-11 | 1987-04-21 | Nec Corp | Probe card |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04276018A (en) * | 1991-03-01 | 1992-10-01 | Kobe Steel Ltd | Manufacture of door guard bar excellent in collapse resistant property |
JPH0513046U (en) * | 1991-07-29 | 1993-02-19 | 山形日本電気株式会社 | Semiconductor probe board inspection device |
JP2000346877A (en) * | 1999-04-02 | 2000-12-15 | Mitsubishi Materials Corp | Contact probe and its manufacture, and probe device using the contact probe, and its manufacture |
Also Published As
Publication number | Publication date |
---|---|
JPH0744205B2 (en) | 1995-05-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |