JPS6448034U - - Google Patents

Info

Publication number
JPS6448034U
JPS6448034U JP14310087U JP14310087U JPS6448034U JP S6448034 U JPS6448034 U JP S6448034U JP 14310087 U JP14310087 U JP 14310087U JP 14310087 U JP14310087 U JP 14310087U JP S6448034 U JPS6448034 U JP S6448034U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
semiconductor
groove
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14310087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH06822Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14310087U priority Critical patent/JPH06822Y2/ja
Publication of JPS6448034U publication Critical patent/JPS6448034U/ja
Application granted granted Critical
Publication of JPH06822Y2 publication Critical patent/JPH06822Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP14310087U 1987-09-21 1987-09-21 半導体ウエハ移載装置 Expired - Lifetime JPH06822Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14310087U JPH06822Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ移載装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14310087U JPH06822Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ移載装置

Publications (2)

Publication Number Publication Date
JPS6448034U true JPS6448034U (US20020051482A1-20020502-M00012.png) 1989-03-24
JPH06822Y2 JPH06822Y2 (ja) 1994-01-05

Family

ID=31409618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14310087U Expired - Lifetime JPH06822Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ移載装置

Country Status (1)

Country Link
JP (1) JPH06822Y2 (US20020051482A1-20020502-M00012.png)

Also Published As

Publication number Publication date
JPH06822Y2 (ja) 1994-01-05

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