JPS6447873A - Photo-cvd method - Google Patents
Photo-cvd methodInfo
- Publication number
- JPS6447873A JPS6447873A JP19998487A JP19998487A JPS6447873A JP S6447873 A JPS6447873 A JP S6447873A JP 19998487 A JP19998487 A JP 19998487A JP 19998487 A JP19998487 A JP 19998487A JP S6447873 A JPS6447873 A JP S6447873A
- Authority
- JP
- Japan
- Prior art keywords
- film
- dissimilar
- starting material
- laser beams
- pulse train
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To improve the decomposition ratio of gaseous starting material, film-forming velocity, and the quality of a film to be formed, by applying pulsed laser beams by means of plural pulse trains having phases dissimilar to each other to carry out photo-CVD. CONSTITUTION:Gaseous starting material supplied to the vicinity of a substrate is excited by means of pulsed laser beam irradiation, by which a thin film is formed on the substrate. In the above photo-CVD method, laser beam irradiation is carried out by means of plural pulse trains consisting of a first pulse train and at least one second pulse train having a phase dissimilar to that of the first pulse train. Since the gaseous starting material is efficiently decomposed by means of the laser beams dissimilar in phase to each other, film- forming velocity as a whole is improved. Simultaneously, the disorder of reaction due to changes of radical concentrations between pulsed laser beams is minimized, by which the quality of the film can be improved.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19998487A JPH066792B2 (en) | 1987-08-12 | 1987-08-12 | Optical CVD method |
PCT/JP1987/001040 WO1988005087A1 (en) | 1986-12-25 | 1987-12-25 | Optical cvd process |
EP88900591A EP0298126B1 (en) | 1986-12-25 | 1987-12-25 | Optical cvd process |
DE3750091T DE3750091T2 (en) | 1986-12-25 | 1987-12-25 | OPTICAL CVD PROCESS. |
KR1019880700472A KR890700174A (en) | 1986-12-25 | 1988-04-30 | Optical CVD method |
US07/973,058 US5308651A (en) | 1986-12-25 | 1992-11-06 | Photochemical vapor deposition process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19998487A JPH066792B2 (en) | 1987-08-12 | 1987-08-12 | Optical CVD method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6447873A true JPS6447873A (en) | 1989-02-22 |
JPH066792B2 JPH066792B2 (en) | 1994-01-26 |
Family
ID=16416852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19998487A Expired - Lifetime JPH066792B2 (en) | 1986-12-25 | 1987-08-12 | Optical CVD method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH066792B2 (en) |
-
1987
- 1987-08-12 JP JP19998487A patent/JPH066792B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH066792B2 (en) | 1994-01-26 |
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