JPS6447873A - Photo-cvd method - Google Patents

Photo-cvd method

Info

Publication number
JPS6447873A
JPS6447873A JP19998487A JP19998487A JPS6447873A JP S6447873 A JPS6447873 A JP S6447873A JP 19998487 A JP19998487 A JP 19998487A JP 19998487 A JP19998487 A JP 19998487A JP S6447873 A JPS6447873 A JP S6447873A
Authority
JP
Japan
Prior art keywords
film
dissimilar
starting material
laser beams
pulse train
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19998487A
Other languages
Japanese (ja)
Other versions
JPH066792B2 (en
Inventor
Tomohiro Oota
Hiroaki Sasaki
Toru Mitomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP19998487A priority Critical patent/JPH066792B2/en
Priority to PCT/JP1987/001040 priority patent/WO1988005087A1/en
Priority to EP88900591A priority patent/EP0298126B1/en
Priority to DE3750091T priority patent/DE3750091T2/en
Priority to KR1019880700472A priority patent/KR890700174A/en
Publication of JPS6447873A publication Critical patent/JPS6447873A/en
Priority to US07/973,058 priority patent/US5308651A/en
Publication of JPH066792B2 publication Critical patent/JPH066792B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To improve the decomposition ratio of gaseous starting material, film-forming velocity, and the quality of a film to be formed, by applying pulsed laser beams by means of plural pulse trains having phases dissimilar to each other to carry out photo-CVD. CONSTITUTION:Gaseous starting material supplied to the vicinity of a substrate is excited by means of pulsed laser beam irradiation, by which a thin film is formed on the substrate. In the above photo-CVD method, laser beam irradiation is carried out by means of plural pulse trains consisting of a first pulse train and at least one second pulse train having a phase dissimilar to that of the first pulse train. Since the gaseous starting material is efficiently decomposed by means of the laser beams dissimilar in phase to each other, film- forming velocity as a whole is improved. Simultaneously, the disorder of reaction due to changes of radical concentrations between pulsed laser beams is minimized, by which the quality of the film can be improved.
JP19998487A 1986-12-25 1987-08-12 Optical CVD method Expired - Lifetime JPH066792B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP19998487A JPH066792B2 (en) 1987-08-12 1987-08-12 Optical CVD method
PCT/JP1987/001040 WO1988005087A1 (en) 1986-12-25 1987-12-25 Optical cvd process
EP88900591A EP0298126B1 (en) 1986-12-25 1987-12-25 Optical cvd process
DE3750091T DE3750091T2 (en) 1986-12-25 1987-12-25 OPTICAL CVD PROCESS.
KR1019880700472A KR890700174A (en) 1986-12-25 1988-04-30 Optical CVD method
US07/973,058 US5308651A (en) 1986-12-25 1992-11-06 Photochemical vapor deposition process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19998487A JPH066792B2 (en) 1987-08-12 1987-08-12 Optical CVD method

Publications (2)

Publication Number Publication Date
JPS6447873A true JPS6447873A (en) 1989-02-22
JPH066792B2 JPH066792B2 (en) 1994-01-26

Family

ID=16416852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19998487A Expired - Lifetime JPH066792B2 (en) 1986-12-25 1987-08-12 Optical CVD method

Country Status (1)

Country Link
JP (1) JPH066792B2 (en)

Also Published As

Publication number Publication date
JPH066792B2 (en) 1994-01-26

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