JPS6447033U - - Google Patents

Info

Publication number
JPS6447033U
JPS6447033U JP14202987U JP14202987U JPS6447033U JP S6447033 U JPS6447033 U JP S6447033U JP 14202987 U JP14202987 U JP 14202987U JP 14202987 U JP14202987 U JP 14202987U JP S6447033 U JPS6447033 U JP S6447033U
Authority
JP
Japan
Prior art keywords
temperature
stage
semiconductor wafer
low
wafer mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14202987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14202987U priority Critical patent/JPS6447033U/ja
Publication of JPS6447033U publication Critical patent/JPS6447033U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14202987U 1987-09-17 1987-09-17 Pending JPS6447033U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14202987U JPS6447033U (OSRAM) 1987-09-17 1987-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14202987U JPS6447033U (OSRAM) 1987-09-17 1987-09-17

Publications (1)

Publication Number Publication Date
JPS6447033U true JPS6447033U (OSRAM) 1989-03-23

Family

ID=31407618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14202987U Pending JPS6447033U (OSRAM) 1987-09-17 1987-09-17

Country Status (1)

Country Link
JP (1) JPS6447033U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07169824A (ja) * 1993-12-13 1995-07-04 Anelva Corp 基板加熱・冷却機構
JP2002353298A (ja) * 2001-05-23 2002-12-06 Tokyo Electron Ltd 載置装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07169824A (ja) * 1993-12-13 1995-07-04 Anelva Corp 基板加熱・冷却機構
JP2002353298A (ja) * 2001-05-23 2002-12-06 Tokyo Electron Ltd 載置装置

Similar Documents

Publication Publication Date Title
JPS6447033U (OSRAM)
JPH02147U (OSRAM)
JPH0345634U (OSRAM)
JPS5974731U (ja) 試料測定装置
JPH01161307U (OSRAM)
JPS63195568U (OSRAM)
JPS6455468U (OSRAM)
JPH0195641U (OSRAM)
JPS5859483U (ja) 電子低温漬物保存器
JPH0388366U (OSRAM)
JPH03110580U (OSRAM)
JPS59143039U (ja) 加熱炉
JPH0426357U (OSRAM)
JPS58136773U (ja) 空気浴式恒温槽
JPS631325U (OSRAM)
JPS6341781U (OSRAM)
JPS63116167U (OSRAM)
JPS6015298U (ja) 乾燥機の制御装置
JPS5836332U (ja) 温度差検査装置
JPS5816864U (ja) 冷却サイクルの制御回路
JPS60188977U (ja) 恒温庫
JPH03101852U (OSRAM)
JPS58155582U (ja) 検体輸送のための恒温装置
JPS5974730U (ja) 試料測定装置
JPS58117766U (ja) スパツタリング装置