JPS644702A - Mirror curvature varying device - Google Patents

Mirror curvature varying device

Info

Publication number
JPS644702A
JPS644702A JP15960887A JP15960887A JPS644702A JP S644702 A JPS644702 A JP S644702A JP 15960887 A JP15960887 A JP 15960887A JP 15960887 A JP15960887 A JP 15960887A JP S644702 A JPS644702 A JP S644702A
Authority
JP
Japan
Prior art keywords
mirror
optical
specular surface
surface part
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15960887A
Other languages
Japanese (ja)
Inventor
Akira Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15960887A priority Critical patent/JPS644702A/en
Publication of JPS644702A publication Critical patent/JPS644702A/en
Pending legal-status Critical Current

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  • Optical Elements Other Than Lenses (AREA)

Abstract

PURPOSE:To enhance the accuracy of an optical mirror and to expand the measuring range of an optical measuring instrument, etc., by using a sheet of electrostrictive element to constitute a driving part which is integrated and joined to the rear face of a specular surface part and partially acting an electrostrictive effect, thereby changing a part or the whole of the curvature on the surface of the specular surface part. CONSTITUTION:The driving part 3 integrated and joined to the rear face of the specular surface part 2 is constituted of a sheet of the electrostrictive element 6 and the surface curvature of the specular surface part 2 is partly or wholly changed by partially acting the electrostrictive effect thereto. The mirror on the optical path of the equipment using the optical mirror and the optical measurement instrument, etc., can be slightly and freely variably changed in part or over the entire part. The accuracy of the mirror is thereby improved and the measurement range of a measuring machine is expanded.
JP15960887A 1987-06-29 1987-06-29 Mirror curvature varying device Pending JPS644702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15960887A JPS644702A (en) 1987-06-29 1987-06-29 Mirror curvature varying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15960887A JPS644702A (en) 1987-06-29 1987-06-29 Mirror curvature varying device

Publications (1)

Publication Number Publication Date
JPS644702A true JPS644702A (en) 1989-01-09

Family

ID=15697429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15960887A Pending JPS644702A (en) 1987-06-29 1987-06-29 Mirror curvature varying device

Country Status (1)

Country Link
JP (1) JPS644702A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009162539A (en) * 2007-12-28 2009-07-23 Fujinon Corp Light wave interferometer apparatus
JP2009244227A (en) * 2008-03-31 2009-10-22 Fujinon Corp Light wave interference measuring method
JP2018014818A (en) * 2016-07-20 2018-01-25 株式会社デンソー Optical scanning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009162539A (en) * 2007-12-28 2009-07-23 Fujinon Corp Light wave interferometer apparatus
JP2009244227A (en) * 2008-03-31 2009-10-22 Fujinon Corp Light wave interference measuring method
JP2018014818A (en) * 2016-07-20 2018-01-25 株式会社デンソー Optical scanning device

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