JPS644681B2 - - Google Patents

Info

Publication number
JPS644681B2
JPS644681B2 JP19966781A JP19966781A JPS644681B2 JP S644681 B2 JPS644681 B2 JP S644681B2 JP 19966781 A JP19966781 A JP 19966781A JP 19966781 A JP19966781 A JP 19966781A JP S644681 B2 JPS644681 B2 JP S644681B2
Authority
JP
Japan
Prior art keywords
transmission line
voltage
microwave
microwave semiconductor
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19966781A
Other languages
Japanese (ja)
Other versions
JPS58100507A (en
Inventor
Tetsuo Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19966781A priority Critical patent/JPS58100507A/en
Publication of JPS58100507A publication Critical patent/JPS58100507A/en
Publication of JPS644681B2 publication Critical patent/JPS644681B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/18Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance
    • H03B5/1841Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a strip line resonator
    • H03B5/1847Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a strip line resonator the active element in the amplifier being a semiconductor device
    • H03B5/1852Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a strip line resonator the active element in the amplifier being a semiconductor device the semiconductor device being a field-effect device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)

Description

【発明の詳細な説明】 本発明は、マイクロ波集積回路(以下「MIC」
と称す)基板に組込まれ、バラクタダイオードの
バイアス電圧で発振周波数の同調が可能な電圧同
調マイクロ波半導体発振器に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides a microwave integrated circuit (hereinafter referred to as "MIC").
The present invention relates to a voltage-tunable microwave semiconductor oscillator that is built into a substrate (called "Varactor diode bias voltage") and whose oscillation frequency can be tuned by the bias voltage of a varactor diode.

従来、この種の電圧同調マイクロ波半導体発振
器として第1図に示すものがある。第1図におい
て、1はマイクロ波帯において低誘電損失を有す
るセラミツクスやテフロン(Teflon:米国デユ
ポン社商品名)などからなるMIC基板としての
誘電体基板、2〜5および8は蒸着法やメツキ法
で形成されたクロムと金との多層金属膜をフオト
エツチング法で成形したマイクロストリツプ線路
であり、2はゲート電極伝送線路、3はドレイン
電極伝送線路、4は出力整合線路、5は50Ω出力
線路、6はゲート電極G、ドレイン電極Dおよび
ソース電極Sがそれぞれ上記各伝送線路2,3,
4に接続されている3端子マイクロ波半導体素子
としてのガリウム・ヒ素メタルセミコンダクタ電
界効果トランジスタ(以下GaAs MES FETと
称す)、7はバイアス電圧によつて接合容量が変
るバラクタダイオード、8はバラクタダイオード
7を高周波的に短絡させるための1/4波長伝送線
路である。
Conventionally, there is a voltage-tuned microwave semiconductor oscillator of this type as shown in FIG. In Fig. 1, 1 is a dielectric substrate as an MIC substrate made of ceramics or Teflon (trade name of DuPont, USA) that has low dielectric loss in the microwave band, and 2 to 5 and 8 are made by vapor deposition or plating method. 2 is a gate electrode transmission line, 3 is a drain electrode transmission line, 4 is an output matching line, and 5 is a 50Ω transmission line. The output line 6 is a gate electrode G, a drain electrode D, and a source electrode S, respectively.
4 is a gallium arsenide metal semiconductor field effect transistor (hereinafter referred to as GaAs MES FET) as a three-terminal microwave semiconductor device, 7 is a varactor diode whose junction capacitance changes depending on the bias voltage, and 8 is a varactor diode 7. This is a 1/4 wavelength transmission line for short-circuiting at high frequencies.

次に作用について説明する。 Next, the effect will be explained.

この電圧同調マイクロ波半導体発振器では、長
さ1/4波長のドレイン電極伝送線路3が接続され
ているドレイン電極Dは高周波的に短絡された状
態となつている。一般にマイクロ波帯で動作する
GaAs MES FET6は、ドレイン電極Dが短絡
した場合には高周波的に不安定である。従つて、
第1図で示すように、高周波的に不安定なGaAs
MES FET6のゲート電極Gにゲート電極伝送線
路2とバラクタダイオード7とで構成した共振回
路を接続し、マイクロ波帯で通常使用されている
50Ω負荷と同じ値の特性インピーダンスの50Ω出
力線路5と、ソース電極Sとを出力整合線路4で
整合することにより、マイクロ波半導体発振器が
構成できる。なお該発振器のマイクロ波電力はソ
ース電極Sから取り出す。ここでこの発振器の発
振周波数は、主として共振回路を構成しているゲ
ート電極伝送線路2の長さlgとバラクタダイオー
ド7の接合容量とにより決まるので、発振周波数
の電圧同調は、バイアス電圧を変化させてバラク
タダイオード7の接合容量を変化させることで可
能である。
In this voltage-tuned microwave semiconductor oscillator, the drain electrode D to which the drain electrode transmission line 3 having a length of 1/4 wavelength is connected is short-circuited at high frequency. generally operates in the microwave band
The GaAs MES FET 6 is unstable at high frequencies when the drain electrode D is short-circuited. Therefore,
As shown in Figure 1, GaAs is unstable at high frequencies.
A resonant circuit composed of a gate electrode transmission line 2 and a varactor diode 7 is connected to the gate electrode G of the MES FET 6, and is normally used in the microwave band.
A microwave semiconductor oscillator can be constructed by matching a 50Ω output line 5 with a characteristic impedance of the same value as a 50Ω load and a source electrode S using an output matching line 4. Note that the microwave power of the oscillator is taken out from the source electrode S. Here, the oscillation frequency of this oscillator is mainly determined by the length lg of the gate electrode transmission line 2 that constitutes the resonant circuit and the junction capacitance of the varactor diode 7, so voltage tuning of the oscillation frequency is achieved by changing the bias voltage. This is possible by changing the junction capacitance of the varactor diode 7.

このように従来の電圧同調マイクロ波半導体発
振器は、MIC化されているので、次のような優
れた利点を有する。即ち、 (a) 発振器の設計が容易である。
Since the conventional voltage-tuned microwave semiconductor oscillator is MIC-based in this way, it has the following excellent advantages. That is, (a) the design of the oscillator is easy;

(b) 小型、軽量である。(b) It is small and lightweight.

(c) 部品点数が少なく、組立が容易である。(c) It has a small number of parts and is easy to assemble.

(d) 信頼性が高い。(d) Highly reliable.

しかし上記従来の電圧同調マイクロ波半導体発
振器は機械的な周波数整調機構がないため、以下
のような欠点があつた。
However, the conventional voltage-tuned microwave semiconductor oscillator described above has the following drawbacks because it does not have a mechanical frequency tuning mechanism.

(a) バラクタダイオード7のボンデイングに用い
られる金ワイヤの長さ、バラクタダイオード7
の接合容量あるいはゲート電極伝送線路2の長
さlgなどの製造上のばらつきにより、一定バラ
クタバイアス電圧において発振周波数がばらつ
く。
(a) Length of gold wire used for bonding varactor diode 7, varactor diode 7
The oscillation frequency varies at a constant varactor bias voltage due to manufacturing variations in the junction capacitance or the length lg of the gate electrode transmission line 2.

(b) 発振周波数の異なる電圧同調マイクロ波半導
体発振器を作る場合、それぞれの発振周波数に
適合するようにゲート電極伝送線路2の長さlg
の異なつたMIC基板もしくは接合容量の異な
つたバラクタダイオード7を必要とし、製造コ
ストが高くなる。
(b) When creating voltage-tuned microwave semiconductor oscillators with different oscillation frequencies, the length lg of the gate electrode transmission line 2 is adjusted to suit each oscillation frequency.
This requires MIC substrates with different values or varactor diodes 7 with different junction capacitances, which increases manufacturing costs.

本発明は以上のような従来のものの欠点を除去
するためになされたもので、バラクタダイオード
を高周波的に短絡させている1/4波長伝送線路に、
電気的に結合して誘電体チツプを配設することに
より、発振周波数の調整が可能な電圧同調マイク
ロ波半導体発振器を提供することを目的としてい
る。
The present invention was made in order to eliminate the above-mentioned drawbacks of the conventional ones.
It is an object of the present invention to provide a voltage-tuned microwave semiconductor oscillator whose oscillation frequency can be adjusted by electrically coupling and arranging a dielectric chip.

以下本発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第2図は本発明の一実施例による電圧同調マイ
クロ波半導体発振器を示す。図において、第1図
と同一符号は同一又は相当部分を示し、9は1/4
波長伝送線路8上に該線路8と直角方向に移動で
きるように載置された誘導体チツプである。
FIG. 2 shows a voltage-tuned microwave semiconductor oscillator according to one embodiment of the invention. In the figure, the same symbols as in Figure 1 indicate the same or equivalent parts, and 9 is 1/4
This is a dielectric chip mounted on the wavelength transmission line 8 so as to be movable in a direction perpendicular to the line 8.

次に作用効果について説明する。 Next, the effects will be explained.

この電圧同調マイクロ波半導体発振器において
は、従来発振器と同様にドレイン電極Dが高周波
的に短絡しているので、GaAs MES FET6は
高周波的に不安定であり、発振する。またその発
振周波数も従来の発振器と同様に主として共振回
路を構成するゲート電極伝送線路2の長さlgとバ
ラクタダイオード7の接合容量とにより決まるの
で、ダイオードバイアス電圧による発振周波数の
電圧同調が可能である。
In this voltage-tuned microwave semiconductor oscillator, the drain electrode D is short-circuited at high frequencies as in the conventional oscillator, so the GaAs MES FET 6 is unstable at high frequencies and oscillates. In addition, as with conventional oscillators, its oscillation frequency is mainly determined by the length lg of the gate electrode transmission line 2 and the junction capacitance of the varactor diode 7, which constitute the resonant circuit, so the oscillation frequency can be voltage-tuned by the diode bias voltage. be.

また本発振器では、バラクタダイオード7を高
周波的に短絡させている1/4波長伝送線路8とこ
の線路8上に載置した誘電体チツプ9とが伝送線
路の漏れ電界によつて電気的に結合しているの
で、誘電体チツプ9によつても発振周波数は影響
を受ける。したがつて1/4波長伝送線路8と誘電
体チツプ9との結合度を調整することにより、発
振周波数の調整が可能である。ここで上記結合度
を調整するには、誘電体チツプ9を図示上下方向
に移動させて1/4波長伝送線路8の中心軸線aと
誘電体チツプ9の図示上端面9a間の距離lを変
化させればよい。
In addition, in this oscillator, the 1/4 wavelength transmission line 8 that short-circuits the varactor diode 7 at high frequency and the dielectric chip 9 placed on this line 8 are electrically coupled by the leakage electric field of the transmission line. Therefore, the oscillation frequency is also affected by the dielectric chip 9. Therefore, by adjusting the degree of coupling between the 1/4 wavelength transmission line 8 and the dielectric chip 9, the oscillation frequency can be adjusted. To adjust the degree of coupling, the dielectric chip 9 is moved vertically in the drawing to change the distance l between the central axis a of the 1/4 wavelength transmission line 8 and the upper end surface 9a of the dielectric chip 9 in the drawing. Just let it happen.

本件発明者は、誘電体チツプ9の発振周波数調
整機能に対する有効性を確認するため、GaAs
MES FET、GaAsシヨツトキバリヤダイオード
およびアルミナセラミツクスの誘電体チツプを用
いてMIC発振回路を構成し、測定を行なつた。
使用したGaAs FET6はゲート長1μm、ゲート
幅800μm、飽和ドレイン電流180mA、バラクタ
ダイオード7は接合径100μm、1Vの逆バイアス
時における接合容量2.5pF、誘電体チツプ9は比
誘電率38、3.10×3.10×0.635mmの角状チツプ、
MIC基板1は比誘電率10、厚さ0.635mmある。
In order to confirm the effectiveness of the oscillation frequency adjustment function of the dielectric chip 9, the inventor of the present invention investigated GaAs
A MIC oscillator circuit was constructed using an MES FET, a GaAs shot barrier diode, and an alumina ceramic dielectric chip, and measurements were performed.
The GaAs FET 6 used has a gate length of 1 μm, a gate width of 800 μm, and a saturated drain current of 180 mA. The varactor diode 7 has a junction diameter of 100 μm and a junction capacitance of 2.5 pF at a reverse bias of 1 V. The dielectric chip 9 has a dielectric constant of 38, 3.10×3.10. ×0.635mm square chip,
The MIC board 1 has a dielectric constant of 10 and a thickness of 0.635 mm.

第3図は上記測定で得られた周波数調整特性を
示し、横軸は1/4波長伝送線路8と誘電体チツプ
9間の距離lを、縦軸は発振周波数fおよび発振
出力Pを示す。図中、f1,P1は誘電体チツプ9の
中心線bと1/4波長伝送線路8の中心軸線aとが
一致したときの値、f2,P2はチツプ9の上端面9
aと線路8の第2図上端辺とが一致したときの
値、f3,P3はチツプ9の上端面9aと線路8の中
心軸線aとが一致したときの値、f4,P4はチツプ
9の上端面9aと線路8の第2図下端辺とが一致
したときの値、f5,P5はチツプ9の上端面9aが
線路8に対して第2図下方にずれたときの値であ
る。この測定結果によれば、距離lを変化させる
ことにより、発振出力Pをほぼ170mWに保つた
まま、発振周波数fを9.52GHzから9.68GHzに調
整することができ、本発明の有効性が確認でき
た。またこの測定において、バラクタバイアス電
圧Vvを5Vから−12Vに変化させたときに、約
200MHzの電圧同調幅が得られた。なお上記特性
は、GaAs MES FET6のソース電極Sとゲー
ト電極Gとに5Ωの抵抗Rsを接続し、ドレイン
電極Dとゲート電極Gとの間に6Vのバイアス電
圧VBと130mAのバイアス電流IBとを印加して得
たものである。
FIG. 3 shows the frequency adjustment characteristics obtained in the above measurements, where the horizontal axis shows the distance l between the 1/4 wavelength transmission line 8 and the dielectric chip 9, and the vertical axis shows the oscillation frequency f and the oscillation output P. In the figure, f 1 and P 1 are the values when the center line b of the dielectric chip 9 and the center axis a of the 1/4 wavelength transmission line 8 coincide, and f 2 and P 2 are the values at the upper end surface 9 of the chip 9.
f 3 , P 3 are the values when a and the upper end side of the line 8 in FIG . is the value when the upper end surface 9a of the chip 9 and the lower end side of the track 8 in FIG . is the value of According to this measurement result, by changing the distance l, the oscillation frequency f can be adjusted from 9.52 GHz to 9.68 GHz while keeping the oscillation output P at approximately 170 mW, confirming the effectiveness of the present invention. Ta. In addition, in this measurement, when the varactor bias voltage Vv was changed from 5V to -12V, approximately
A voltage tuning width of 200MHz was obtained. The above characteristics are obtained by connecting a 5Ω resistor Rs to the source electrode S and gate electrode G of the GaAs MES FET6, and applying a 6V bias voltage V B and a 130 mA bias current I B between the drain electrode D and gate electrode G. It is obtained by applying .

なお上実施例では3端子マイクロ波半導体素子
としてGaAs MES FETを用いた場合について
述べたが、この3端子マイクロ波半導体素子とし
てはゲート電極、ドレイン電極およソース電極を
それぞれベース電極、コレクタ電極およびエミツ
タ電極に置き換えることでマイクロ波接合型トラ
ンジスタを用いることができることは言うまでも
ない。
In the above embodiment, a case was described in which a GaAs MES FET was used as a three-terminal microwave semiconductor device, but in this three-terminal microwave semiconductor device, the gate electrode, drain electrode, and source electrode are respectively connected to the base electrode, collector electrode, and It goes without saying that a microwave junction transistor can be used by replacing it with an emitter electrode.

以上のように、本発明によれば、MIC基板上
に組み込まれ高周波的に不安定となつている3端
子マイクロ波半導体素子の一電極に、共振回路を
構成する伝送線路とバラクタダイオードとを接続
し、バラクタダイオードを高周波的に短絡する1/
4波長伝送線路に電気的に結合して誘電体チツプ
を配置したので、周波数調整可能な実用性の高い
電圧同調マイクロ波半導体発振器が得られるとい
う効果がある。
As described above, according to the present invention, a transmission line and a varactor diode constituting a resonant circuit are connected to one electrode of a three-terminal microwave semiconductor element that is incorporated on a MIC board and is unstable at high frequencies. 1/ which shorts the varactor diode at high frequency.
Since the dielectric chip is electrically coupled to the four-wavelength transmission line, it is possible to obtain a highly practical voltage-tunable microwave semiconductor oscillator that can adjust the frequency.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の電圧同調マイクロ波半導体発振
器の平面図、第2図は本発明の一実施例による電
圧同調マイクロ波半導体発振器の平面図、第3図
は上記発振器の周波数調整特性の測定結果を示す
図である。 1……誘電体基板(マイクロ波集積回路基板)、
2……ゲート電極伝送線路、6……GaAs MES
FET(3端子マイクロ波半導体素子)、7……バ
ラクタダイオード、8……1/4波長伝送線路(高
周波短絡用伝送線路)、9……誘電体チツプ。な
お図中、同一符号は同一又は相当部分を示す。
FIG. 1 is a plan view of a conventional voltage-tuned microwave semiconductor oscillator, FIG. 2 is a plan view of a voltage-tuned microwave semiconductor oscillator according to an embodiment of the present invention, and FIG. 3 is a measurement result of the frequency adjustment characteristics of the oscillator. FIG. 1...Dielectric substrate (microwave integrated circuit board),
2...Gate electrode transmission line, 6...GaAs MES
FET (3-terminal microwave semiconductor element), 7...Varactor diode, 8...1/4 wavelength transmission line (transmission line for high frequency short circuit), 9...Dielectric chip. In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】 1 マイクロ波集積回路基板上に組込まれ、直列
的または並列的な帰還回路を有して高周波的に不
安定となつている3端子マイクロ波半導体素子
と、該3端子マイクロ波半導体素子の一端子に接
続された伝送線路と、該伝送線路の他端に接続さ
れて該伝送線路とともに共振回路を構成し発振周
波数の電圧同調を行なうためのバラクタダイオー
ドと、一端が該バラクタダイオードの他端に接続
され他端が解放され約1/4波長の長さを有する高
調波短絡用伝送線路と、該高調波短絡用伝送線路
上に密着して配置され該伝送線路上を伝送線路と
直角方向に移動することで該伝送線路との電気的
結合度を変化させて上記発振周波数の調整を行な
うための誘電体チツプとを備えたことを特徴とす
る電圧同調マイクロ波半導体発振器。 2 上記3端子マイクロ波半導体素子が電界効果
トランジスタであり、該電界効果トランジスタは
そのドレイン電極が高調波的に短絡されゲート電
極に上記伝送線路が接続されソース電極よりマイ
クロ波電力が取り出されることを特徴とする特許
請求の範囲第1項記載の電圧同調マイクロ波半導
体発振器。 3 上記3端子マイクロ波半導体素子が接合型ト
ランジスタであることを特徴とする特許請求の範
囲第1項記載の電圧同調マイクロ波半導体発振
器。
[Claims] 1. A three-terminal microwave semiconductor element that is incorporated on a microwave integrated circuit board and has a series or parallel feedback circuit and is unstable at high frequencies; a transmission line connected to one terminal of the wave semiconductor element; a varactor diode connected to the other end of the transmission line to form a resonant circuit together with the transmission line to perform voltage tuning of the oscillation frequency; and one end connected to the varactor diode. A harmonic shorting transmission line connected to the other end of the diode and having the other end open and having a length of approximately 1/4 wavelength, and a harmonic shorting transmission line that is placed in close contact with the harmonic shorting transmission line and transmits on the transmission line. A voltage-tuned microwave semiconductor oscillator comprising: a dielectric chip that adjusts the oscillation frequency by changing the degree of electrical coupling with the transmission line by moving in a direction perpendicular to the transmission line. 2. The three-terminal microwave semiconductor device is a field effect transistor, and the field effect transistor has its drain electrode harmonically shorted, its gate electrode connected to the transmission line, and microwave power extracted from its source electrode. A voltage-tuned microwave semiconductor oscillator according to claim 1, characterized in: 3. The voltage-tuned microwave semiconductor oscillator according to claim 1, wherein the three-terminal microwave semiconductor element is a junction transistor.
JP19966781A 1981-12-09 1981-12-09 Voltage tuning microwave semiconductor oscillator Granted JPS58100507A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19966781A JPS58100507A (en) 1981-12-09 1981-12-09 Voltage tuning microwave semiconductor oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19966781A JPS58100507A (en) 1981-12-09 1981-12-09 Voltage tuning microwave semiconductor oscillator

Publications (2)

Publication Number Publication Date
JPS58100507A JPS58100507A (en) 1983-06-15
JPS644681B2 true JPS644681B2 (en) 1989-01-26

Family

ID=16411617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19966781A Granted JPS58100507A (en) 1981-12-09 1981-12-09 Voltage tuning microwave semiconductor oscillator

Country Status (1)

Country Link
JP (1) JPS58100507A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06216640A (en) * 1993-01-19 1994-08-05 Fujitsu Ltd High frequency circuit

Also Published As

Publication number Publication date
JPS58100507A (en) 1983-06-15

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