JPS5930309A - Voltage tuning microwave semiconductor oscillator - Google Patents

Voltage tuning microwave semiconductor oscillator

Info

Publication number
JPS5930309A
JPS5930309A JP14086882A JP14086882A JPS5930309A JP S5930309 A JPS5930309 A JP S5930309A JP 14086882 A JP14086882 A JP 14086882A JP 14086882 A JP14086882 A JP 14086882A JP S5930309 A JPS5930309 A JP S5930309A
Authority
JP
Japan
Prior art keywords
transmission line
frequency
microwave semiconductor
varactor diode
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14086882A
Other languages
Japanese (ja)
Inventor
Tetsuo Mori
哲郎 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14086882A priority Critical patent/JPS5930309A/en
Publication of JPS5930309A publication Critical patent/JPS5930309A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/18Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance
    • H03B5/1841Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a strip line resonator
    • H03B5/1847Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a strip line resonator the active element in the amplifier being a semiconductor device
    • H03B5/1852Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a strip line resonator the active element in the amplifier being a semiconductor device the semiconductor device being a field-effect device

Abstract

PURPOSE:To adjust an oscillating frequency, by connecting a frequency adjusting electrode made of a metallic piece to other end of a 1/4 wavelength transmission line short-circuiting a varactor diode in terms of high frequency. CONSTITUTION:The oscillating frequency of a GaAs meta semiconductor FET3 depends mainly on a junction capacitance of the varactor diode 7 and the length lg of a gate electrode transmission line 2 constituting a resonance circuit. Further, the frequency at which the diode 7 is short-circuited in terms of high frequency is changed by connecting the metallic piece of the frequency adjusting electrode 9 to an end of the 1/4 wavelength transmission line 8 short-circuiting the diode 7 in terms of high frequency by means of a jumper 10. That is, the adjustment of the oscillating frequency is attained by connecting the line 8 and the metallic piece of the electrode 9 with the jumper 10 for a suitable number.

Description

【発明の詳細な説明】 この発明はマイクロ波集積回路基板(以下MIC基板と
称す)に組込まれ、バラクタダイオードのバイアス電圧
で発振周波数の同調が可能な電圧同調マイクロ波半導体
発振器に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a voltage-tunable microwave semiconductor oscillator that is incorporated in a microwave integrated circuit board (hereinafter referred to as an MIC board) and whose oscillation frequency can be tuned by a bias voltage of a varactor diode.

第1図は従来の電圧同調マイクロ波半導体発振器を示す
平面図である。同図において、(1)はマイクロ波帯に
おいて低誘電損失を有するセラミックスやテフロン(T
eflon :米国デュポン社商品名)などからなるM
IC基板としての誘電体基板、(2)はゲート電極伝送
線路、(3)はドレイン電極伝送線路、(4)は出力整
合線路、(5)は50Ω出力線路、(6)はゲート電極
(6)がゲート電極伝送線路(2)に接続し、ドレイン
電極(ロ)がドレイン電極伝送線路(3)に接続し、ソ
ース電極(S)が出力整合線路(4)に接続する3端子
マイクロ波半導体素子としてのガリウム・ヒ素メタルセ
ミコンダクタ電界効果トランジスタ(以下GaAmME
8FETと言う)、(7)はバイアス電圧によって接合
容量が変るバラクタダイオード、(8)はこのバラクタ
ダイオード(7;を高周波的に短絡させるだめの1/4
波長伝送線路である。
FIG. 1 is a plan view showing a conventional voltage-tuned microwave semiconductor oscillator. In the figure, (1) is made of ceramics or Teflon (Teflon), which have low dielectric loss in the microwave band.
M consisting of eflon (product name of DuPont, USA), etc.
A dielectric substrate as an IC substrate, (2) is a gate electrode transmission line, (3) is a drain electrode transmission line, (4) is an output matching line, (5) is a 50Ω output line, and (6) is a gate electrode (6). ) is connected to the gate electrode transmission line (2), the drain electrode (b) is connected to the drain electrode transmission line (3), and the source electrode (S) is connected to the output matching line (4). Gallium arsenide metal semiconductor field effect transistor (hereinafter GaAmME) as an element
8FET), (7) is a varactor diode whose junction capacitance changes depending on the bias voltage, and (8) is a 1/4 of the varactor diode that short-circuits this varactor diode (7) at high frequency.
It is a wavelength transmission line.

なお、上記ゲート電極伝送線路(2)、ドレイン電極伝
送線路(3)、出力整合線路(41、500出力線路(
5)および1/4波長伝送線路(8)は蒸着法やメッキ
法で形成されたクロムと金の多層金属膜をフォトエツチ
ング法で成形したマイクロストリップ線路である。
In addition, the gate electrode transmission line (2), the drain electrode transmission line (3), the output matching line (41, 500 output line (
5) and the 1/4 wavelength transmission line (8) are microstrip lines formed by photoetching a multilayer metal film of chromium and gold formed by vapor deposition or plating.

次に、上記構成による電圧同調マイクロ波半導体発振器
の動作について説明する。まず、GaAsMESFET
(61のドレイン電極の)は1/4波長のドレイン電極
伝送線(3)が接続されているので、高周波的には短絡
された状態となっている。一般に、マイクロ波帯で動作
するGaAsMESFETf61はドレイン電極(9)
が短絡した場合には高周波的に不安定である。
Next, the operation of the voltage-tuned microwave semiconductor oscillator with the above configuration will be explained. First, GaAs MESFET
(of the drain electrode 61) is connected to the 1/4 wavelength drain electrode transmission line (3), so it is in a short-circuited state in terms of high frequency. Generally, GaAs MESFET f61 that operates in the microwave band has a drain electrode (9).
When short-circuited, it becomes unstable at high frequencies.

したがって、高周波的に不安定なGaAsMESFET
(6)のゲート電極(G)にゲート電極伝送線路(2)
とバラクタダイオード(7)で構成した共振回路を接続
し、マイクロ波帯で通常使用されている50Ω負荷と同
じ値の特性インピーダンスの500出力線路(5)とソ
ース電極(S)を出力整合線路(4)で整合することに
よシ、マイクロ波を発振させることができる。
Therefore, the GaAs MESFET is unstable at high frequencies.
Gate electrode transmission line (2) to gate electrode (G) of (6)
and a resonant circuit composed of a varactor diode (7), and connect a 500Ω output line (5) with the same characteristic impedance as the 50Ω load normally used in the microwave band and a source electrode (S) to an output matching line ( By matching in step 4), microwaves can be oscillated.

なお、この電圧同調マイクロ波半導体発振器の発振周波
数は主として共振回路を構成しているゲート電極伝送線
路(2+の長さtgとバラクタダイオード(7)の接合
容量によって決まるので、発振周波数の電圧同調はバイ
アス電圧の変化でバラクタダイオード(7)の接合容量
を変化させることができる。
Note that the oscillation frequency of this voltage-tuned microwave semiconductor oscillator is mainly determined by the gate electrode transmission line (length tg of 2+ and the junction capacitance of the varactor diode (7) that constitutes the resonant circuit, so the voltage tuning of the oscillation frequency is The junction capacitance of the varactor diode (7) can be changed by changing the bias voltage.

このように、従来の電圧同調マイクロ波半導体発振器は
MIC化されているので、(イ)発振器の設計が容易で
あること、(ロ)小型、軽量であること、(ハ)部品点
数が少なく、組立が容易であること、に)信頼性が高い
こと、などの利点がある。
In this way, since the conventional voltage-tuned microwave semiconductor oscillator is made into an MIC, (a) the oscillator is easy to design, (b) it is small and lightweight, and (c) it has a small number of parts. It has advantages such as easy assembly and high reliability.

しかしながら、従来の電圧同調マイクロ波半導体発振器
は発振周波数を調整する部分が無いので、(ホ)バラク
タダイオード(7)のポンディングに用いられる金ワイ
ヤの長さ、バラクタダイオード(7)の接合容量あるい
はゲート電極伝送線路(2)の長さtgなどの製造上の
ばらつきによシ、発振周波数がばらつく、(へ)発振周
波数の異なる電圧同調マイクロ波半導体発振器を作る場
合、それぞれの発振周波数に適合するように、ゲート電
極伝送線路(2)の長さtgの異なったバラクタダイオ
ード(7)を必要とし、製造コストが高くなるなどの欠
点があった。
However, since conventional voltage-tuned microwave semiconductor oscillators do not have a part to adjust the oscillation frequency, (e) the length of the gold wire used for bonding the varactor diode (7), the junction capacitance of the varactor diode (7), The oscillation frequency will vary due to manufacturing variations such as the length tg of the gate electrode transmission line (2).When making voltage-tuned microwave semiconductor oscillators with different oscillation frequencies, it is necessary to adapt the oscillation frequency to each one. Thus, the gate electrode transmission line (2) requires varactor diodes (7) with different lengths tg, which has the disadvantage of increasing manufacturing cost.

しだがって、この発明の目的は発振周波数の調整が可能
な電圧同調マイクロ波半導体発振器を提供するものであ
る。
Therefore, an object of the present invention is to provide a voltage-tunable microwave semiconductor oscillator whose oscillation frequency can be adjusted.

このような目的を達成するため、この発明は前記バラク
タダイオードを高周波的に短絡する1/4波長伝送線路
の他端に少なくとも一枚の金属片からなる周波数調整用
電極を電気的に接続するものであシ、以下実施例を用い
て詳細に説明する。
In order to achieve such an object, the present invention electrically connects a frequency adjustment electrode made of at least one metal piece to the other end of a quarter wavelength transmission line that short-circuits the varactor diodes at high frequency. This will be explained in detail below using examples.

第2図はこの発明に係る電圧同調マイクロ波半導体発振
器の一実施例を示す平面図である。同図において、(9
)は前記1/4波長伝送線路(8)の終端部に配置した
複数個の金属片からなる周波数調整用電極、00)は前
記1/4波長伝送線路(8)とこの周波数調整用電極(
9)の金属片を電気的に接続する金線などの接続線であ
る。
FIG. 2 is a plan view showing an embodiment of the voltage-tuned microwave semiconductor oscillator according to the present invention. In the same figure, (9
) is a frequency adjustment electrode made of a plurality of metal pieces placed at the end of the 1/4 wavelength transmission line (8), and 00) is a frequency adjustment electrode (00) between the 1/4 wavelength transmission line (8) and this frequency adjustment electrode (00).
9) A connecting wire such as a gold wire that electrically connects the metal pieces.

次に、上記構成による電圧同調マイクロ波半導体発振器
の動作について説明する。まず、GaA5ME 5FE
T(61のドレイン電極(至)は14波長のドレイン電
極伝送線(3)が接続されているので、高周波的には短
絡された状態になっている。したがって、マイクロ波帯
で動作するGaAgMESFET(6Jはドレイン電極
(ロ)が短絡した場合には高周波的に不安定である。こ
のため、この高周波的に不安定なGaAsMESFET
(61のゲート電極(G)にゲート電極伝送線路(2)
とバラクタダイオード(7)で構成した共振回路を接続
し、マイクロ波帯で通常使用されている50Ω負荷と同
じ値の特性インピーダンスの500出力線路(5)とソ
ース電極(S)を出力整合線路(4)で整合することに
よシ、マイクロ波を発振させることができる。
Next, the operation of the voltage-tuned microwave semiconductor oscillator with the above configuration will be explained. First, GaA5ME 5FE
Since the drain electrode (to) of T (61) is connected to the drain electrode transmission line (3) of 14 wavelengths, it is in a short-circuited state in terms of high frequency. 6J is unstable at high frequencies when the drain electrode (b) is short-circuited.For this reason, this GaAs MESFET is unstable at high frequencies.
(Gate electrode transmission line (2) to gate electrode (G) of 61)
and a resonant circuit composed of a varactor diode (7), and connect a 500Ω output line (5) with the same characteristic impedance as the 50Ω load normally used in the microwave band and a source electrode (S) to an output matching line ( By matching in step 4), microwaves can be oscillated.

そして、その発振周波数社主として共振回路を構成して
いるゲート電極伝送線路(2)の長さtgとバラクタダ
イオード(7Jの接合容量によって決まるので、発振周
波数の電圧同調はバイアス電圧の変化でバラクタダイオ
ード(7)の接合容量を変化させることができる。そし
て、このバラクタダイオード(7)を高周波的に短絡さ
せている1/4波長伝送線路(8)の終端部に周波数調
整用電極(9)の金属片を接続線Qlで接続すると、バ
ラクタダイオード(7)が高周波的に短絡する周波数が
変化する。このため、発振周波数も変化する。つまム 
1/4波長伝送線路(8)と周波数調整用電極(9)の
金属片を接続線00)で適当な数だけ接続することによ
って、発振周波数の調整が可能になる。
The oscillation frequency is determined by the length tg of the gate electrode transmission line (2) that constitutes the resonant circuit and the junction capacitance of the varactor diode (7J), so the voltage tuning of the oscillation frequency is achieved by changing the bias voltage. The junction capacitance of (7) can be changed.Furthermore, a frequency adjustment electrode (9) is installed at the end of the quarter wavelength transmission line (8) which short-circuits this varactor diode (7) at high frequency. When the metal pieces are connected with the connection line Ql, the frequency at which the varactor diode (7) is shorted in high frequency changes.Therefore, the oscillation frequency also changes.
The oscillation frequency can be adjusted by connecting an appropriate number of metal pieces of the 1/4 wavelength transmission line (8) and the frequency adjustment electrode (9) with the connecting wire 00).

第3図は第2図に示す電圧同調マイクロ波半導体発振器
の周波数調整特性の測定結果を示す図であり、横軸は1
/4波長伝送線路に接続している周波数調整用電極(9
)の金属片の数Nを示し、縦軸は発振周波数fおよび発
振出力Pを示す。なお、使用するGaAmMESFET
f61はゲート長1μm 、ゲート幅SOOμm、飽和
ドレイン電流180mAである。GaA3ショットキバ
リアダイオード(7)は接合径1ooμm、IVの逆バ
イアスにおける接合容量は2.5 P Fである。
Figure 3 is a diagram showing the measurement results of the frequency adjustment characteristics of the voltage-tuned microwave semiconductor oscillator shown in Figure 2, where the horizontal axis is 1
/4 Frequency adjustment electrode (9) connected to the wavelength transmission line
) represents the number N of metal pieces, and the vertical axis represents the oscillation frequency f and the oscillation output P. In addition, the GaAm MESFET used
f61 has a gate length of 1 μm, a gate width of SOO μm, and a saturated drain current of 180 mA. The GaA3 Schottky barrier diode (7) has a junction diameter of 10 μm and a junction capacitance at IV reverse bias of 2.5 PF.

1/4波長伝送線路(8)は長さ2.9龍、特性インピ
ーダンス50Ωのマイクロストリップ線路である。周波
数調整用電極(9)は06酊×02關の金属片を0.2
yattt間隔で4個並べる。また、GaAgMESF
ET(6Jのソース電極(S)とゲート電極1)とに5
0の抵抗Rsを接続し、ドレイン電極(ロ)とゲート電
極初との間に6■のバイアス電圧VBと140mAのバ
イアス電流■1を流し、まだGaAaショットキバリア
ダイオードに一12Vのバラクタバイアス電圧■7を印
加する。
The 1/4 wavelength transmission line (8) is a microstrip line with a length of 2.9 mm and a characteristic impedance of 50 Ω. The frequency adjustment electrode (9) is a metal piece of 0.2 x 0.2
Arrange 4 pieces at intervals of yattt. Also, GaAgMESF
ET (source electrode (S) of 6J and gate electrode 1) and 5
A resistor Rs of 0 is connected, a bias voltage VB of 6 and a bias current 1 of 140 mA are applied between the drain electrode (b) and the gate electrode, and a varactor bias voltage of 12 V is applied to the GaAa Schottky barrier diode. Apply 7.

この第3図かられかるように、1/4波長伝送線路(8
)に周波数調整電極(9)の金属片を4個接続したとき
、発振出力Pを100mW以上に保ったまま、発振周波
数fを8.5GHzから9.1GHzに調整することが
できる。また、バラクタバイアス電圧■7を一5vから
一12Vに変化させたときに、約200MHzの電圧同
調幅が得られる。
As shown in Fig. 3, the 1/4 wavelength transmission line (8
), the oscillation frequency f can be adjusted from 8.5 GHz to 9.1 GHz while maintaining the oscillation output P at 100 mW or more. Further, when the varactor bias voltage (7) is changed from -5V to -12V, a voltage tuning width of about 200MHz is obtained.

また、上記実施例では3端子マイクロ波半導体素子とし
てGaAsMESFETを用いた場合を示したがマイク
ロ波接合型トランジスタを用いてもよいことはもちろん
である。また、接続線00)として金線を用いた場合を
示したが、金リボンを用いてもよいことはもちろんであ
る。
Further, although the above embodiment shows a case where a GaAs MESFET is used as the three-terminal microwave semiconductor element, it goes without saying that a microwave junction type transistor may also be used. Further, although a case is shown in which a gold wire is used as the connection line 00), it goes without saying that a gold ribbon may also be used.

以上詳細に説明したように、この発明に係る電圧同調マ
イクロ波半導体発振器によればMIC基板上に組み込ま
れ、高周波的に不安定となっている3端子マイクロ波半
導体素子の一電極に、共振回路を構成する伝送線路とバ
ラクタダイオードとを接続し、バラクタダイオードを高
周波的に短絡する1/4波長伝送線路の他端に、この伝
送線路と接続可能な複数枚の金属片よシなる周波数調整
用電極を配置したので、発振周波数の調整を可能にする
ことができる効果がある。
As explained in detail above, according to the voltage-tuned microwave semiconductor oscillator according to the present invention, a resonant circuit is connected to one electrode of the three-terminal microwave semiconductor element that is incorporated on the MIC substrate and is unstable at high frequencies. At the other end of the 1/4 wavelength transmission line, which connects the transmission line and the varactor diode that make up the transmission line and short-circuits the varactor diode at high frequency, there is a frequency adjustment material made of multiple metal pieces that can be connected to this transmission line. The arrangement of the electrodes has the effect of making it possible to adjust the oscillation frequency.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の電圧同調マイクロ波半導体発振器を示す
平面図、第2図はこの発明に係る電圧同調マイクロ波半
導体発振器の一実施例を示す平面図、第3図は第2図に
示す電圧同調マイクロ波半導体発振器の周波数調整特性
の測定結果を示す図である。 (1)・・・・誘電体基板(マイクロ波集積回路)、(
2)・・・・ゲート電極伝送線路、(3)・・・・ドレ
イン電極伝送線路、(4)・・・・出力整合線路、(5
)・・・・50Ω出力線路、(6)・・・・ガリウムヒ
素メタルセミコンダクタ電界効果トランジスタ(3端子
マイクロ波半導体素子)、(7)・・・・バラクタダイ
オード、(8)・・・・1/4波長伝送線路(高周波短
終用伝送線路)、(91・・・・周波数調整用電極、0
0)・・・・接続線。 なお、図中、同一符号は同一または相当部分を示す。 代理人    葛  野  信  − 第1図 1 第2図 第3図 1234 □N 手続補正書(自発) 特許庁長官殿 1、事件の表示    特願昭 57−140868号
2、発明の名称 電圧同調マイクロ波半導体発振器 3、補正をする者 事件との関係   特許出願人 住 所     東京都千代田区丸の山王丁目2番3号
名 称(601)   三菱電機株式会社代表者片由仁
八部 4、代理人 住 所     東京都千代田区丸の山王丁目2番3号
42− 5、補正の対象 明細書の発明の詳細な説明の欄 6、補正の内容 明細書第4頁第3行の「ことができる。」を「ことでで
きる。」と補正する。 以  上 (2)
FIG. 1 is a plan view showing a conventional voltage-tuned microwave semiconductor oscillator, FIG. 2 is a plan view showing an embodiment of the voltage-tuned microwave semiconductor oscillator according to the present invention, and FIG. 3 is a plan view showing the voltages shown in FIG. FIG. 3 is a diagram showing measurement results of frequency adjustment characteristics of a tuned microwave semiconductor oscillator. (1) Dielectric substrate (microwave integrated circuit), (
2)...Gate electrode transmission line, (3)...Drain electrode transmission line, (4)...Output matching line, (5
)...50Ω output line, (6)...Gallium arsenide metal semiconductor field effect transistor (3-terminal microwave semiconductor device), (7)...Varactor diode, (8)...1 /4 wavelength transmission line (transmission line for high frequency short termination), (91...frequency adjustment electrode, 0
0)... Connection line. In addition, in the figures, the same reference numerals indicate the same or corresponding parts. Agent Makoto Kuzuno - Figure 1 1 Figure 2 Figure 3 1234 □N Procedural amendment (voluntary) Commissioner of the Japan Patent Office 1, Indication of case Patent application No. 57-140868 2, Title of invention Voltage-tuned microwave Semiconductor oscillator 3, relationship with the amended person case Patent applicant address 2-3 Sanno-chome, Maruno, Chiyoda-ku, Tokyo Name (601) Mitsubishi Electric Corporation Representative Katayuni Hachibe 4, Agent address 42-5, Sanno-chome 2-3, Maruno, Chiyoda-ku, Tokyo, Column 6 of the detailed explanation of the invention in the specification subject to the amendment, "Can be done" on page 4, line 3 of the specification of the contents of the amendment. "You can do it." I corrected him. Above (2)

Claims (1)

【特許請求の範囲】[Claims] マイクロ波集積回路基板上に組込まれ、高周波的に不安
定になっている3端子マイクロ波半導体素子と、この3
端子マイクロ波半導体素子の一端子に接続する伝送線路
と、この伝送線路の他端に接続し、この伝送線路と共に
共振回路を構成し、発振周波数の電圧同調を行なうバラ
クタダイオードと、一端がバラクタダイオードの他端に
接続する約174波長の長さを有する高周波短絡用伝送
線路と、この高周波伝送線路に電気的に接続して発振周
波数を調節する少なくとも一枚の金属片からなる周波数
調整用電極とを備えたことを特徴とする電圧同調マイク
ロ波半導体発振器。
A three-terminal microwave semiconductor element that is incorporated on a microwave integrated circuit board and is unstable at high frequencies;
A transmission line connected to one terminal of the terminal microwave semiconductor element, a varactor diode connected to the other end of this transmission line and forming a resonant circuit together with this transmission line to perform voltage tuning of the oscillation frequency, and a varactor diode at one end. a high-frequency short-circuiting transmission line having a length of about 174 wavelengths connected to the other end; and a frequency adjustment electrode made of at least one metal piece electrically connected to the high-frequency transmission line to adjust the oscillation frequency. A voltage-tuned microwave semiconductor oscillator characterized by comprising:
JP14086882A 1982-08-11 1982-08-11 Voltage tuning microwave semiconductor oscillator Pending JPS5930309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14086882A JPS5930309A (en) 1982-08-11 1982-08-11 Voltage tuning microwave semiconductor oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14086882A JPS5930309A (en) 1982-08-11 1982-08-11 Voltage tuning microwave semiconductor oscillator

Publications (1)

Publication Number Publication Date
JPS5930309A true JPS5930309A (en) 1984-02-17

Family

ID=15278610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14086882A Pending JPS5930309A (en) 1982-08-11 1982-08-11 Voltage tuning microwave semiconductor oscillator

Country Status (1)

Country Link
JP (1) JPS5930309A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6423113U (en) * 1987-07-30 1989-02-07
US5457431A (en) * 1994-03-08 1995-10-10 Harris Corporation Electronic tuning circuit and method of manufacture
EP0742639A3 (en) * 1995-05-09 1997-12-29 IMEC vzw Microwave oscillator, an antenna therefor and methods of manufacture
JP4921487B2 (en) * 2005-11-29 2012-04-25 ポスコ Air guide type wire guider

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6423113U (en) * 1987-07-30 1989-02-07
US5457431A (en) * 1994-03-08 1995-10-10 Harris Corporation Electronic tuning circuit and method of manufacture
EP0742639A3 (en) * 1995-05-09 1997-12-29 IMEC vzw Microwave oscillator, an antenna therefor and methods of manufacture
JP4921487B2 (en) * 2005-11-29 2012-04-25 ポスコ Air guide type wire guider

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