JPS6445543A - Transfer device - Google Patents
Transfer deviceInfo
- Publication number
- JPS6445543A JPS6445543A JP20307387A JP20307387A JPS6445543A JP S6445543 A JPS6445543 A JP S6445543A JP 20307387 A JP20307387 A JP 20307387A JP 20307387 A JP20307387 A JP 20307387A JP S6445543 A JPS6445543 A JP S6445543A
- Authority
- JP
- Japan
- Prior art keywords
- tray
- substance
- pusher
- hole
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Feeding Of Workpieces (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Abstract
PURPOSE:To weaken a dust generating property with simple constitution by forming a through-hole through which a support can be inserted and withdrawn and transferring a mounting plate on which a substance to be processed is mounted in the withdrawal of support. CONSTITUTION:A substance 1 to be processed transferred by a belt conveyer is lifted and supported by a pusher 9 elevated through a through-hole 8 in a tray 6. The belt conveyer is opened left and right under such condition and the pusher 9 is slowly lowered, so that said substance 1 is mounted on the tray 6, fitting in a groove 6a thereof and the pusher 9 is completely withdrawn out of the through-hole 8 in the tray 6. When said substance 1 is mounted on the tray 6, a rotary transfer arm 10 is moved right below the tray 6 and a tray pusher 7 is lowered to mount the tray 6 on the distal end of said arm 10. Said substance 1 is transferred to a preparatory chamber by rotating the rotary arm 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20307387A JPS6445543A (en) | 1987-08-17 | 1987-08-17 | Transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20307387A JPS6445543A (en) | 1987-08-17 | 1987-08-17 | Transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445543A true JPS6445543A (en) | 1989-02-20 |
Family
ID=16467899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20307387A Pending JPS6445543A (en) | 1987-08-17 | 1987-08-17 | Transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445543A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001159692A (en) * | 1999-10-11 | 2001-06-12 | Leica Microsystems Wetzler Gmbh | Device and method for assembling various transparent substrate in high accuracy masurement apparatus |
| JP2006156762A (en) * | 2004-11-30 | 2006-06-15 | Sumitomo Eaton Noba Kk | Wafer treatment apparatus and method therefor, and ion implanter |
| JP2020181860A (en) * | 2019-04-24 | 2020-11-05 | パナソニックＩｐマネジメント株式会社 | Board conveyance system and board conveyance method |
| CN112643821A (en) * | 2020-12-23 | 2021-04-13 | 夏旭东 | Wood conveying device of woodworking grooving machine |
-
1987
- 1987-08-17 JP JP20307387A patent/JPS6445543A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001159692A (en) * | 1999-10-11 | 2001-06-12 | Leica Microsystems Wetzler Gmbh | Device and method for assembling various transparent substrate in high accuracy masurement apparatus |
| JP2006156762A (en) * | 2004-11-30 | 2006-06-15 | Sumitomo Eaton Noba Kk | Wafer treatment apparatus and method therefor, and ion implanter |
| US8096744B2 (en) | 2004-11-30 | 2012-01-17 | Sen Corporation, An Shi And Axcelis Company | Wafer processing system, wafer processing method, and ion implantation system |
| JP2020181860A (en) * | 2019-04-24 | 2020-11-05 | パナソニックＩｐマネジメント株式会社 | Board conveyance system and board conveyance method |
| CN112643821A (en) * | 2020-12-23 | 2021-04-13 | 夏旭东 | Wood conveying device of woodworking grooving machine |
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