JPS6445153U - - Google Patents

Info

Publication number
JPS6445153U
JPS6445153U JP13798287U JP13798287U JPS6445153U JP S6445153 U JPS6445153 U JP S6445153U JP 13798287 U JP13798287 U JP 13798287U JP 13798287 U JP13798287 U JP 13798287U JP S6445153 U JPS6445153 U JP S6445153U
Authority
JP
Japan
Prior art keywords
inert gas
chamber
heat exchanger
gas flow
conduit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13798287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437881Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13798287U priority Critical patent/JPH0437881Y2/ja
Publication of JPS6445153U publication Critical patent/JPS6445153U/ja
Application granted granted Critical
Publication of JPH0437881Y2 publication Critical patent/JPH0437881Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
JP13798287U 1987-09-09 1987-09-09 Expired JPH0437881Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13798287U JPH0437881Y2 (en, 2012) 1987-09-09 1987-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13798287U JPH0437881Y2 (en, 2012) 1987-09-09 1987-09-09

Publications (2)

Publication Number Publication Date
JPS6445153U true JPS6445153U (en, 2012) 1989-03-17
JPH0437881Y2 JPH0437881Y2 (en, 2012) 1992-09-04

Family

ID=31399904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13798287U Expired JPH0437881Y2 (en, 2012) 1987-09-09 1987-09-09

Country Status (1)

Country Link
JP (1) JPH0437881Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH0437881Y2 (en, 2012) 1992-09-04

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