JPS6445098A - Cathode for large diameter plasma generating device - Google Patents
Cathode for large diameter plasma generating deviceInfo
- Publication number
- JPS6445098A JPS6445098A JP62200903A JP20090387A JPS6445098A JP S6445098 A JPS6445098 A JP S6445098A JP 62200903 A JP62200903 A JP 62200903A JP 20090387 A JP20090387 A JP 20090387A JP S6445098 A JPS6445098 A JP S6445098A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- porous carbon
- filament
- generating device
- large diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Plasma Technology (AREA)
Abstract
PURPOSE:To decide the shape of a cathode in accordance with necessity by constituting a cathode plate discharging hot electrons from porous carbon having a certain value of specific resistance. CONSTITUTION:An indirectly heated cathode uses porous carbon 1a, and is made into a size, for ex., of 68mm in dia. and 3mm thick. The bottoms of two of the four Mo rods 3 are connected with a lead 9 for heater, and the tops are welded with W filament 8 for heating of the cathode. The distance between cathode plate 1a and filament 8 is as short as 3mm to allow effective heating with radiating heat from the filament 8, and the coating for generation of hot electrons applied on the porous carbon plate 1a is activated to emit electrons. As the cathode plate 1a this is formed from porous carbon 1a having a specific resistance of 1OMEGA.cm-10<-3>OMEGA.cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62200903A JPS6445098A (en) | 1987-08-13 | 1987-08-13 | Cathode for large diameter plasma generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62200903A JPS6445098A (en) | 1987-08-13 | 1987-08-13 | Cathode for large diameter plasma generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445098A true JPS6445098A (en) | 1989-02-17 |
Family
ID=16432177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62200903A Pending JPS6445098A (en) | 1987-08-13 | 1987-08-13 | Cathode for large diameter plasma generating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445098A (en) |
-
1987
- 1987-08-13 JP JP62200903A patent/JPS6445098A/en active Pending
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