JPS6443744A - Surface sticking body counting device - Google Patents

Surface sticking body counting device

Info

Publication number
JPS6443744A
JPS6443744A JP62199065A JP19906587A JPS6443744A JP S6443744 A JPS6443744 A JP S6443744A JP 62199065 A JP62199065 A JP 62199065A JP 19906587 A JP19906587 A JP 19906587A JP S6443744 A JPS6443744 A JP S6443744A
Authority
JP
Japan
Prior art keywords
measurement
sticking
measurement liquid
inspected
ultrasonic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62199065A
Other languages
Japanese (ja)
Inventor
Nobumi Hattori
Hayaaki Fukumoto
Toshiaki Omori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62199065A priority Critical patent/JPS6443744A/en
Publication of JPS6443744A publication Critical patent/JPS6443744A/en
Pending legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE:To reproduce the grain size distribution of materials sticking on the surface of a body to be inspected in measurement liquid and to measure the sticking particles more accurately by providing an ultrasonic wave oscillation source adjacently to a measurement tank. CONSTITUTION:The measurement tank 101 is filled with the measurement liquid and the body to be inspected is dipped therein. Then the ultrasonic wave oscillator 102a is put in operation to generate an ultrasonic wave and sticking bodies of grain size of large cleaning effect in the frequency range are cleaned out in the measurement liquid, and then cleaned out by actuating the ultrasonic wave oscillator 102b-102d successively. Thus, the sticking bodies sticking on the surface of the body to be inspected are cleaned out and the body to be inspected is lifted from the measurement liquid. Then a measuring instrument 103 measures the number of the sticking particles cleaned out in the measurement liquid. Namely, a measurement light beam is projected in the measurement liquid from the light emission source 103a and a measurement light beam which is scattered by the sticking particles 104 in the measurement liquid is photodetected 103b to measure the quantity of the scattered light, thereby accurately counting the number of the particles from the quantity of the scattered light.
JP62199065A 1987-08-11 1987-08-11 Surface sticking body counting device Pending JPS6443744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62199065A JPS6443744A (en) 1987-08-11 1987-08-11 Surface sticking body counting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62199065A JPS6443744A (en) 1987-08-11 1987-08-11 Surface sticking body counting device

Publications (1)

Publication Number Publication Date
JPS6443744A true JPS6443744A (en) 1989-02-16

Family

ID=16401525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62199065A Pending JPS6443744A (en) 1987-08-11 1987-08-11 Surface sticking body counting device

Country Status (1)

Country Link
JP (1) JPS6443744A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999056107A1 (en) * 1998-04-28 1999-11-04 Asahi Kasei Kogyo Kabushiki Kaisha Membrane breakage detection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999056107A1 (en) * 1998-04-28 1999-11-04 Asahi Kasei Kogyo Kabushiki Kaisha Membrane breakage detection device

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