JPS6443744A - Surface sticking body counting device - Google Patents
Surface sticking body counting deviceInfo
- Publication number
- JPS6443744A JPS6443744A JP62199065A JP19906587A JPS6443744A JP S6443744 A JPS6443744 A JP S6443744A JP 62199065 A JP62199065 A JP 62199065A JP 19906587 A JP19906587 A JP 19906587A JP S6443744 A JPS6443744 A JP S6443744A
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- sticking
- measurement liquid
- inspected
- ultrasonic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 abstract 11
- 239000007788 liquid Substances 0.000 abstract 7
- 239000002245 particle Substances 0.000 abstract 4
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000010356 wave oscillation Effects 0.000 abstract 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
PURPOSE:To reproduce the grain size distribution of materials sticking on the surface of a body to be inspected in measurement liquid and to measure the sticking particles more accurately by providing an ultrasonic wave oscillation source adjacently to a measurement tank. CONSTITUTION:The measurement tank 101 is filled with the measurement liquid and the body to be inspected is dipped therein. Then the ultrasonic wave oscillator 102a is put in operation to generate an ultrasonic wave and sticking bodies of grain size of large cleaning effect in the frequency range are cleaned out in the measurement liquid, and then cleaned out by actuating the ultrasonic wave oscillator 102b-102d successively. Thus, the sticking bodies sticking on the surface of the body to be inspected are cleaned out and the body to be inspected is lifted from the measurement liquid. Then a measuring instrument 103 measures the number of the sticking particles cleaned out in the measurement liquid. Namely, a measurement light beam is projected in the measurement liquid from the light emission source 103a and a measurement light beam which is scattered by the sticking particles 104 in the measurement liquid is photodetected 103b to measure the quantity of the scattered light, thereby accurately counting the number of the particles from the quantity of the scattered light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62199065A JPS6443744A (en) | 1987-08-11 | 1987-08-11 | Surface sticking body counting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62199065A JPS6443744A (en) | 1987-08-11 | 1987-08-11 | Surface sticking body counting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6443744A true JPS6443744A (en) | 1989-02-16 |
Family
ID=16401525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62199065A Pending JPS6443744A (en) | 1987-08-11 | 1987-08-11 | Surface sticking body counting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6443744A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999056107A1 (en) * | 1998-04-28 | 1999-11-04 | Asahi Kasei Kogyo Kabushiki Kaisha | Membrane breakage detection device |
-
1987
- 1987-08-11 JP JP62199065A patent/JPS6443744A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999056107A1 (en) * | 1998-04-28 | 1999-11-04 | Asahi Kasei Kogyo Kabushiki Kaisha | Membrane breakage detection device |
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