JPS6443096A - No-contact type linear actuator - Google Patents

No-contact type linear actuator

Info

Publication number
JPS6443096A
JPS6443096A JP62199602A JP19960287A JPS6443096A JP S6443096 A JPS6443096 A JP S6443096A JP 62199602 A JP62199602 A JP 62199602A JP 19960287 A JP19960287 A JP 19960287A JP S6443096 A JPS6443096 A JP S6443096A
Authority
JP
Japan
Prior art keywords
propulsion
attitude
control current
magnetic pole
serving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62199602A
Other languages
Japanese (ja)
Other versions
JP2717174B2 (en
Inventor
Toshiro Higuchi
Hideki Kawakatsu
Atsushi Horikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP62199602A priority Critical patent/JP2717174B2/en
Publication of JPS6443096A publication Critical patent/JPS6443096A/en
Application granted granted Critical
Publication of JP2717174B2 publication Critical patent/JP2717174B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)

Abstract

PURPOSE:To reduce the area of coil winding while suppressing energy loss such as a copper loss by supplying a propulsive control current and an attitude control current to an excitation coil serving for both propulsion and attitude controls. CONSTITUTION:A fixed body 1 is provided with magnetic pole groups MG1-MG4 to be arranged on an internal surface side facing a tooth train 2T in a moving member 2. Excitation coils L1-L4, serving for both propulsion and attitude controls, are mounted being respectively wound on the magnetic pole groups MG1-MG4. While gap sensors G1-G4, which detect a gap between the fixed body 1 and the moving member 2, are provided in a position in the vicinity of each magnetic pole group MG1-MG4. And adding a propulsion control current and an attitude control current calculated based on a moving instruction and detection signals of the gap sensors G1-G4 by a propulsion control part 11 and an attitude control part 12, there control currents are supplied to the excitation coils L1-L4 serving for both propulsion and attitude controls.
JP62199602A 1987-08-10 1987-08-10 Non-contact linear actuator Expired - Fee Related JP2717174B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62199602A JP2717174B2 (en) 1987-08-10 1987-08-10 Non-contact linear actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62199602A JP2717174B2 (en) 1987-08-10 1987-08-10 Non-contact linear actuator

Publications (2)

Publication Number Publication Date
JPS6443096A true JPS6443096A (en) 1989-02-15
JP2717174B2 JP2717174B2 (en) 1998-02-18

Family

ID=16410586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62199602A Expired - Fee Related JP2717174B2 (en) 1987-08-10 1987-08-10 Non-contact linear actuator

Country Status (1)

Country Link
JP (1) JP2717174B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113224928A (en) * 2020-02-05 2021-08-06 佳能株式会社 Conveyance system, processing system, and article manufacturing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4897210A (en) * 1972-01-21 1973-12-11
JPS5959063A (en) * 1982-09-28 1984-04-04 Fujitsu Ltd Linear pulse motor
JPS62110472A (en) * 1985-11-08 1987-05-21 Toshiro Higuchi Non-contact type actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4897210A (en) * 1972-01-21 1973-12-11
JPS5959063A (en) * 1982-09-28 1984-04-04 Fujitsu Ltd Linear pulse motor
JPS62110472A (en) * 1985-11-08 1987-05-21 Toshiro Higuchi Non-contact type actuator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113224928A (en) * 2020-02-05 2021-08-06 佳能株式会社 Conveyance system, processing system, and article manufacturing method
JP2021125979A (en) * 2020-02-05 2021-08-30 キヤノン株式会社 Conveyance system

Also Published As

Publication number Publication date
JP2717174B2 (en) 1998-02-18

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