JPS6443096A - No-contact type linear actuator - Google Patents
No-contact type linear actuatorInfo
- Publication number
- JPS6443096A JPS6443096A JP62199602A JP19960287A JPS6443096A JP S6443096 A JPS6443096 A JP S6443096A JP 62199602 A JP62199602 A JP 62199602A JP 19960287 A JP19960287 A JP 19960287A JP S6443096 A JPS6443096 A JP S6443096A
- Authority
- JP
- Japan
- Prior art keywords
- propulsion
- attitude
- control current
- magnetic pole
- serving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Linear Motors (AREA)
- Linear Motors (AREA)
Abstract
PURPOSE:To reduce the area of coil winding while suppressing energy loss such as a copper loss by supplying a propulsive control current and an attitude control current to an excitation coil serving for both propulsion and attitude controls. CONSTITUTION:A fixed body 1 is provided with magnetic pole groups MG1-MG4 to be arranged on an internal surface side facing a tooth train 2T in a moving member 2. Excitation coils L1-L4, serving for both propulsion and attitude controls, are mounted being respectively wound on the magnetic pole groups MG1-MG4. While gap sensors G1-G4, which detect a gap between the fixed body 1 and the moving member 2, are provided in a position in the vicinity of each magnetic pole group MG1-MG4. And adding a propulsion control current and an attitude control current calculated based on a moving instruction and detection signals of the gap sensors G1-G4 by a propulsion control part 11 and an attitude control part 12, there control currents are supplied to the excitation coils L1-L4 serving for both propulsion and attitude controls.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62199602A JP2717174B2 (en) | 1987-08-10 | 1987-08-10 | Non-contact linear actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62199602A JP2717174B2 (en) | 1987-08-10 | 1987-08-10 | Non-contact linear actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6443096A true JPS6443096A (en) | 1989-02-15 |
JP2717174B2 JP2717174B2 (en) | 1998-02-18 |
Family
ID=16410586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62199602A Expired - Fee Related JP2717174B2 (en) | 1987-08-10 | 1987-08-10 | Non-contact linear actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2717174B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113224928A (en) * | 2020-02-05 | 2021-08-06 | 佳能株式会社 | Conveyance system, processing system, and article manufacturing method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4897210A (en) * | 1972-01-21 | 1973-12-11 | ||
JPS5959063A (en) * | 1982-09-28 | 1984-04-04 | Fujitsu Ltd | Linear pulse motor |
JPS62110472A (en) * | 1985-11-08 | 1987-05-21 | Toshiro Higuchi | Non-contact type actuator |
-
1987
- 1987-08-10 JP JP62199602A patent/JP2717174B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4897210A (en) * | 1972-01-21 | 1973-12-11 | ||
JPS5959063A (en) * | 1982-09-28 | 1984-04-04 | Fujitsu Ltd | Linear pulse motor |
JPS62110472A (en) * | 1985-11-08 | 1987-05-21 | Toshiro Higuchi | Non-contact type actuator |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113224928A (en) * | 2020-02-05 | 2021-08-06 | 佳能株式会社 | Conveyance system, processing system, and article manufacturing method |
JP2021125979A (en) * | 2020-02-05 | 2021-08-30 | キヤノン株式会社 | Conveyance system |
Also Published As
Publication number | Publication date |
---|---|
JP2717174B2 (en) | 1998-02-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |