JPS6442834A - Robot device - Google Patents

Robot device

Info

Publication number
JPS6442834A
JPS6442834A JP19910287A JP19910287A JPS6442834A JP S6442834 A JPS6442834 A JP S6442834A JP 19910287 A JP19910287 A JP 19910287A JP 19910287 A JP19910287 A JP 19910287A JP S6442834 A JPS6442834 A JP S6442834A
Authority
JP
Japan
Prior art keywords
slider
attached
follower gear
rack
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19910287A
Other languages
Japanese (ja)
Inventor
Kaoru Takai
Satoshi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAN METSUKU KK
Original Assignee
SAN METSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAN METSUKU KK filed Critical SAN METSUKU KK
Priority to JP19910287A priority Critical patent/JPS6442834A/en
Publication of JPS6442834A publication Critical patent/JPS6442834A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To make the entire device small in size by a method wherein a slider, with which a rotatory movement is converted into a linear movement by interlicking an arm to a driving rotary shaft, is provided and the material to be treated is always moved up and down vertically against the working position or a treatment vessel. CONSTITUTION:The gear 47 attached to a rotating shaft 39 is engaged with a follower gear 48, a roll 49 is attached to the follower gear 48, an almost L-shaped slider 51, equipped with a longitudinal groove 50 in which the roll 49 will be fitted, is dropped into the guide groove 9a on a substrate 9. Besides, the slider 51 is provided in a freely slidable manner through the intermediaries of a slider base 52, attached to the substrate, and a cross-roller bearing mechanism 51a, and one end of a rack 26 is fixed to the slider 51. Accordingly, the slider 51 performs a sliding movement in synchronization with the conveying speed in association with the rotation of a rotating shaft 39, and the driving is transmitted to the second clutch mechanism 23 through the rack 26. As a result, when the slider 51 is shifted by the rotation of the follower gear 48, the material to be treated comes down almost vertically to the first treatment vessel.
JP19910287A 1987-08-11 1987-08-11 Robot device Pending JPS6442834A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19910287A JPS6442834A (en) 1987-08-11 1987-08-11 Robot device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19910287A JPS6442834A (en) 1987-08-11 1987-08-11 Robot device

Publications (1)

Publication Number Publication Date
JPS6442834A true JPS6442834A (en) 1989-02-15

Family

ID=16402157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19910287A Pending JPS6442834A (en) 1987-08-11 1987-08-11 Robot device

Country Status (1)

Country Link
JP (1) JPS6442834A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102290360A (en) * 2011-03-16 2011-12-21 哈尔滨工业大学 T-shaft rotation limiting structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102290360A (en) * 2011-03-16 2011-12-21 哈尔滨工业大学 T-shaft rotation limiting structure

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