JPS6442834A - Robot device - Google Patents
Robot deviceInfo
- Publication number
- JPS6442834A JPS6442834A JP19910287A JP19910287A JPS6442834A JP S6442834 A JPS6442834 A JP S6442834A JP 19910287 A JP19910287 A JP 19910287A JP 19910287 A JP19910287 A JP 19910287A JP S6442834 A JPS6442834 A JP S6442834A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- attached
- follower gear
- rack
- roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To make the entire device small in size by a method wherein a slider, with which a rotatory movement is converted into a linear movement by interlicking an arm to a driving rotary shaft, is provided and the material to be treated is always moved up and down vertically against the working position or a treatment vessel. CONSTITUTION:The gear 47 attached to a rotating shaft 39 is engaged with a follower gear 48, a roll 49 is attached to the follower gear 48, an almost L-shaped slider 51, equipped with a longitudinal groove 50 in which the roll 49 will be fitted, is dropped into the guide groove 9a on a substrate 9. Besides, the slider 51 is provided in a freely slidable manner through the intermediaries of a slider base 52, attached to the substrate, and a cross-roller bearing mechanism 51a, and one end of a rack 26 is fixed to the slider 51. Accordingly, the slider 51 performs a sliding movement in synchronization with the conveying speed in association with the rotation of a rotating shaft 39, and the driving is transmitted to the second clutch mechanism 23 through the rack 26. As a result, when the slider 51 is shifted by the rotation of the follower gear 48, the material to be treated comes down almost vertically to the first treatment vessel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19910287A JPS6442834A (en) | 1987-08-11 | 1987-08-11 | Robot device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19910287A JPS6442834A (en) | 1987-08-11 | 1987-08-11 | Robot device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6442834A true JPS6442834A (en) | 1989-02-15 |
Family
ID=16402157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19910287A Pending JPS6442834A (en) | 1987-08-11 | 1987-08-11 | Robot device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6442834A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102290360A (en) * | 2011-03-16 | 2011-12-21 | 哈尔滨工业大学 | T-shaft rotation limiting structure |
-
1987
- 1987-08-11 JP JP19910287A patent/JPS6442834A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102290360A (en) * | 2011-03-16 | 2011-12-21 | 哈尔滨工业大学 | T-shaft rotation limiting structure |
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