JPS64406A - Instrument for measuring shape of sample - Google Patents

Instrument for measuring shape of sample

Info

Publication number
JPS64406A
JPS64406A JP15621287A JP15621287A JPS64406A JP S64406 A JPS64406 A JP S64406A JP 15621287 A JP15621287 A JP 15621287A JP 15621287 A JP15621287 A JP 15621287A JP S64406 A JPS64406 A JP S64406A
Authority
JP
Japan
Prior art keywords
sample
plane
interference
rear face
fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15621287A
Other languages
Japanese (ja)
Other versions
JPH01406A (en
JP2557650B2 (en
Inventor
Koji Osawa
Hitoshi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidek Co Ltd
Original Assignee
Nidek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidek Co Ltd filed Critical Nidek Co Ltd
Priority to JP62156212A priority Critical patent/JP2557650B2/en
Publication of JPH01406A publication Critical patent/JPH01406A/en
Publication of JPS64406A publication Critical patent/JPS64406A/en
Application granted granted Critical
Publication of JP2557650B2 publication Critical patent/JP2557650B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To enable accurate measurement regardless of a fluctuation in the positional relation of a datum plane and interferometer by providing a sample stage which has the datum plane and strongly attracts a sample.
CONSTITUTION: Many small holes for force attraction of the sample 1 are bored to the datum plane 2' of the sample stage 2 so that the sample 1 is brought perfectly into tight contact with the plane 2'. The plane 2' is inclined with respect to an optical flat and the rugged state of interference fringes is unequivocally determined. Namely, the interference fringes of the plane 2' except the sample 1 surface are straight lines of equal intervals which exactly denote the inclined state of the rear face of the sample. The difference C in the ruggedness in the direction perpendicular to the rear face of the sample is, therefore, calculated by removing the inclined component of the rear face of the sample 1 from the rugged state determined from the interference fringe on the front face of the sample 1. The laser luminous flux from a light source 3 induces the interference of the luminous fluxes reflected from the reference face 7' of a prism 7 and the front face of the sample 1. This interference luminous fluxes are sent via a TV camera 9 to an image processor 10 where the recognition of the sample region and the discrimination of the interference fringes are executed and the calculation of data to determine the order of the fringes, etc. and the analysis of the rugged state are executed.
COPYRIGHT: (C)1989,JPO&Japio
JP62156212A 1987-06-23 1987-06-23 Sample shape measuring device Expired - Lifetime JP2557650B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156212A JP2557650B2 (en) 1987-06-23 1987-06-23 Sample shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156212A JP2557650B2 (en) 1987-06-23 1987-06-23 Sample shape measuring device

Publications (3)

Publication Number Publication Date
JPH01406A JPH01406A (en) 1989-01-05
JPS64406A true JPS64406A (en) 1989-01-05
JP2557650B2 JP2557650B2 (en) 1996-11-27

Family

ID=15622811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156212A Expired - Lifetime JP2557650B2 (en) 1987-06-23 1987-06-23 Sample shape measuring device

Country Status (1)

Country Link
JP (1) JP2557650B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001304837A (en) * 2000-04-19 2001-10-31 Nok Corp Plane inspection apparatus and plane inspection method
JP2010060677A (en) * 2008-09-02 2010-03-18 Sumitomo Bakelite Co Ltd Tool for measuring film surface shape, and method of measurement
JP2021167786A (en) * 2020-04-13 2021-10-21 株式会社神戸製鋼所 Flatness measuring device and method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4559271B2 (en) * 2005-03-25 2010-10-06 東ソー株式会社 Method and apparatus for measuring thickness unevenness of flat plate
US11333607B2 (en) 2018-10-02 2022-05-17 Electronics And Telecommunications Research Institute Fluorescent signal detection apparatus using diagnostic kit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985906U (en) * 1982-12-01 1984-06-11 富士写真光機株式会社 Flatness measuring device
JPS60209106A (en) * 1984-03-31 1985-10-21 Konishiroku Photo Ind Co Ltd Flatness inspecting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985906U (en) * 1982-12-01 1984-06-11 富士写真光機株式会社 Flatness measuring device
JPS60209106A (en) * 1984-03-31 1985-10-21 Konishiroku Photo Ind Co Ltd Flatness inspecting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001304837A (en) * 2000-04-19 2001-10-31 Nok Corp Plane inspection apparatus and plane inspection method
JP4529227B2 (en) * 2000-04-19 2010-08-25 Ｎｏｋ株式会社 Plane inspection apparatus and plane inspection method
JP2010060677A (en) * 2008-09-02 2010-03-18 Sumitomo Bakelite Co Ltd Tool for measuring film surface shape, and method of measurement
JP2021167786A (en) * 2020-04-13 2021-10-21 株式会社神戸製鋼所 Flatness measuring device and method

Also Published As

Publication number Publication date
JP2557650B2 (en) 1996-11-27

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