JPS644027A - Vapor drying device - Google Patents

Vapor drying device

Info

Publication number
JPS644027A
JPS644027A JP15765387A JP15765387A JPS644027A JP S644027 A JPS644027 A JP S644027A JP 15765387 A JP15765387 A JP 15765387A JP 15765387 A JP15765387 A JP 15765387A JP S644027 A JPS644027 A JP S644027A
Authority
JP
Japan
Prior art keywords
treatment chamber
treatment
vapor
chamber
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15765387A
Other languages
Japanese (ja)
Inventor
Shoji Hara
Masami Kanegae
Yoshio Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15765387A priority Critical patent/JPS644027A/en
Publication of JPS644027A publication Critical patent/JPS644027A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To prevent a mist in a fluid for treatment use from being generated and a foreign matter or the like from being caught by a method wherein a treatment chamber is connected to the outside via an interconnection port formed at one part of the treatment chamber and a vapor generated inside the treatment chamber is condensed at the outside of the treatment chamber. CONSTITUTION:A fluid 2 for treatment use inside a treatment chamber 1 is heated by a heating element 3; an atmosphere of a vapor 2a of the fluid 2 for treatment use is formed inside the treatment chamber 1; a heating lamp 8 is lighted; the inside of an opening 1a is heated at a prescribed temperature. The vapor 2a which has been formed inside the treatment chamber 1 and has risen to a height of an interconnection port 1b overflows into a cooling chamber 7 and is condensed on the surface of a cooling spiral pipe 7a; the inside of the cooling chamber 7 becomes a negative pressure; the vapor 2a continuously overflows from the treatment chamber 1 to the cooling chamber 7; an ascending stream of the vapor 2a displaying a laminar stream is formed inside the treatment chamber 1. A normal- temperature object 5 to be treated which has been housed in a transfer jig 6 is lowered inside the treatment chamber 1 through the opening 1a; it is kept at a standstill in a position which is lower than the interconnection port 1b and in an atmosphere region of the vapor 2a. By this setup, water or oils and fats which have adhered to the surface of the object 5 to be treated are replaced with liquid drops of the fluid 2 for treatment use; the replaced water or the like drops to the bottom of the treatment chamber 1 together with the liquid drops of the liquid 2 for treatment use and is removed.
JP15765387A 1987-06-26 1987-06-26 Vapor drying device Pending JPS644027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15765387A JPS644027A (en) 1987-06-26 1987-06-26 Vapor drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15765387A JPS644027A (en) 1987-06-26 1987-06-26 Vapor drying device

Publications (1)

Publication Number Publication Date
JPS644027A true JPS644027A (en) 1989-01-09

Family

ID=15654428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15765387A Pending JPS644027A (en) 1987-06-26 1987-06-26 Vapor drying device

Country Status (1)

Country Link
JP (1) JPS644027A (en)

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