JPS6440089U - - Google Patents

Info

Publication number
JPS6440089U
JPS6440089U JP1987135114U JP13511487U JPS6440089U JP S6440089 U JPS6440089 U JP S6440089U JP 1987135114 U JP1987135114 U JP 1987135114U JP 13511487 U JP13511487 U JP 13511487U JP S6440089 U JPS6440089 U JP S6440089U
Authority
JP
Japan
Prior art keywords
fixed part
elastic hinge
thin flexible
arm
movable section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987135114U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543439Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987135114U priority Critical patent/JPH0543439Y2/ja
Publication of JPS6440089U publication Critical patent/JPS6440089U/ja
Application granted granted Critical
Publication of JPH0543439Y2 publication Critical patent/JPH0543439Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1987135114U 1987-09-03 1987-09-03 Expired - Lifetime JPH0543439Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987135114U JPH0543439Y2 (enrdf_load_stackoverflow) 1987-09-03 1987-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987135114U JPH0543439Y2 (enrdf_load_stackoverflow) 1987-09-03 1987-09-03

Publications (2)

Publication Number Publication Date
JPS6440089U true JPS6440089U (enrdf_load_stackoverflow) 1989-03-09
JPH0543439Y2 JPH0543439Y2 (enrdf_load_stackoverflow) 1993-11-01

Family

ID=31394458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987135114U Expired - Lifetime JPH0543439Y2 (enrdf_load_stackoverflow) 1987-09-03 1987-09-03

Country Status (1)

Country Link
JP (1) JPH0543439Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007040537A (ja) * 2002-09-30 2007-02-15 Asml Netherlands Bv リソグラフィ投影装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007040537A (ja) * 2002-09-30 2007-02-15 Asml Netherlands Bv リソグラフィ投影装置
US7239369B2 (en) 2002-09-30 2007-07-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7417711B2 (en) 2002-09-30 2008-08-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPH0543439Y2 (enrdf_load_stackoverflow) 1993-11-01

Similar Documents

Publication Publication Date Title
JP3556067B2 (ja) 剪断型圧電素子を用いたアクチュエータ及びこのアクチュエータを使用したヘッド微小移動機構
JPS6440089U (enrdf_load_stackoverflow)
JPS6440087U (enrdf_load_stackoverflow)
JPS6440088U (enrdf_load_stackoverflow)
JPS63172903U (enrdf_load_stackoverflow)
JPH0347733U (enrdf_load_stackoverflow)
JPH03122419U (enrdf_load_stackoverflow)
JPS62107688A (ja) 小型アクチユエ−タ
JPH0394089U (enrdf_load_stackoverflow)
JPS61183555U (enrdf_load_stackoverflow)
JPH0413917U (enrdf_load_stackoverflow)
JPS62147706U (enrdf_load_stackoverflow)
JPH0222093U (enrdf_load_stackoverflow)
JPH031692U (enrdf_load_stackoverflow)
JPH0329820U (enrdf_load_stackoverflow)
JPH0349669U (enrdf_load_stackoverflow)
JPH02110992U (enrdf_load_stackoverflow)
JPH0170544U (enrdf_load_stackoverflow)
JPH0360890U (enrdf_load_stackoverflow)
JPS6351592U (enrdf_load_stackoverflow)
JPS62198889U (enrdf_load_stackoverflow)
JPS62149642U (enrdf_load_stackoverflow)
JPH05153790A (ja) 回転微動機構
JPS62184648U (enrdf_load_stackoverflow)
JPH0313619U (enrdf_load_stackoverflow)