JPS6439718A - Manufacture of thin film - Google Patents
Manufacture of thin filmInfo
- Publication number
- JPS6439718A JPS6439718A JP19691287A JP19691287A JPS6439718A JP S6439718 A JPS6439718 A JP S6439718A JP 19691287 A JP19691287 A JP 19691287A JP 19691287 A JP19691287 A JP 19691287A JP S6439718 A JPS6439718 A JP S6439718A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- scanned
- substrate
- material gas
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To uniformly grow a film of large area without loving a substrate by scanning an injection nozzle of material gas along the substrate face in an apparatus for performing a CVD method. CONSTITUTION:A nozzle 4 for injecting material gas is connected to a material gas introducing tube 41 by a flexible tube 43 to inject the gas toward both substrates 3 on a support 2. The nozzle 4 can be scanned in a charged particle beam incident direction. A beam 7 emitted from a charged particle beam source 6 is so controlled as to always focus it in the vicinity of a gas injection port 42 at the end of the nozzle 4 which can be scanned through an orifice 12. When the nozzle 4 is scanned in the incident direction of the beam 7 while growing the film, the space of a reaction chamber 1 can be reduced as compared with the case that the substrate is moved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19691287A JPS6439718A (en) | 1987-08-06 | 1987-08-06 | Manufacture of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19691287A JPS6439718A (en) | 1987-08-06 | 1987-08-06 | Manufacture of thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6439718A true JPS6439718A (en) | 1989-02-10 |
Family
ID=16365725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19691287A Pending JPS6439718A (en) | 1987-08-06 | 1987-08-06 | Manufacture of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6439718A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05335239A (en) * | 1992-05-27 | 1993-12-17 | Tokyo Electron Ltd | Film forming apparatus |
US6884298B2 (en) * | 2000-05-10 | 2005-04-26 | Tokyo Electron Limited | Method and system for coating and developing |
JP2008053298A (en) * | 2006-08-22 | 2008-03-06 | Hitachi Kokusai Electric Inc | Semiconductor manufacturing system |
JP2008053504A (en) * | 2006-08-25 | 2008-03-06 | Hitachi Kokusai Electric Inc | Semiconductor manufacturing apparatus |
-
1987
- 1987-08-06 JP JP19691287A patent/JPS6439718A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05335239A (en) * | 1992-05-27 | 1993-12-17 | Tokyo Electron Ltd | Film forming apparatus |
US6884298B2 (en) * | 2000-05-10 | 2005-04-26 | Tokyo Electron Limited | Method and system for coating and developing |
JP2008053298A (en) * | 2006-08-22 | 2008-03-06 | Hitachi Kokusai Electric Inc | Semiconductor manufacturing system |
JP2008053504A (en) * | 2006-08-25 | 2008-03-06 | Hitachi Kokusai Electric Inc | Semiconductor manufacturing apparatus |
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