JPS6439641U - - Google Patents

Info

Publication number
JPS6439641U
JPS6439641U JP13475087U JP13475087U JPS6439641U JP S6439641 U JPS6439641 U JP S6439641U JP 13475087 U JP13475087 U JP 13475087U JP 13475087 U JP13475087 U JP 13475087U JP S6439641 U JPS6439641 U JP S6439641U
Authority
JP
Japan
Prior art keywords
wafer cassette
side plates
support plates
cassette
gripping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13475087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13475087U priority Critical patent/JPS6439641U/ja
Publication of JPS6439641U publication Critical patent/JPS6439641U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP13475087U 1987-09-03 1987-09-03 Pending JPS6439641U (US06168776-20010102-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13475087U JPS6439641U (US06168776-20010102-C00041.png) 1987-09-03 1987-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13475087U JPS6439641U (US06168776-20010102-C00041.png) 1987-09-03 1987-09-03

Publications (1)

Publication Number Publication Date
JPS6439641U true JPS6439641U (US06168776-20010102-C00041.png) 1989-03-09

Family

ID=31393781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13475087U Pending JPS6439641U (US06168776-20010102-C00041.png) 1987-09-03 1987-09-03

Country Status (1)

Country Link
JP (1) JPS6439641U (US06168776-20010102-C00041.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148417A (en) * 1979-05-07 1980-11-19 Nec Kyushu Ltd Magazine case for accommodating semiconductor substrate
JPS5947739A (ja) * 1982-09-10 1984-03-17 Hitachi Ltd ウエハ処理用治具
JPS60187027A (ja) * 1984-03-07 1985-09-24 Marine Instr Co Ltd 部品の洗浄方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148417A (en) * 1979-05-07 1980-11-19 Nec Kyushu Ltd Magazine case for accommodating semiconductor substrate
JPS5947739A (ja) * 1982-09-10 1984-03-17 Hitachi Ltd ウエハ処理用治具
JPS60187027A (ja) * 1984-03-07 1985-09-24 Marine Instr Co Ltd 部品の洗浄方法

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