JPS6439633U - - Google Patents
Info
- Publication number
- JPS6439633U JPS6439633U JP13226587U JP13226587U JPS6439633U JP S6439633 U JPS6439633 U JP S6439633U JP 13226587 U JP13226587 U JP 13226587U JP 13226587 U JP13226587 U JP 13226587U JP S6439633 U JPS6439633 U JP S6439633U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- hoist
- cleaning
- air
- duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
- 238000012993 chemical processing Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13226587U JPS6439633U (,) | 1987-09-01 | 1987-09-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13226587U JPS6439633U (,) | 1987-09-01 | 1987-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439633U true JPS6439633U (,) | 1989-03-09 |
Family
ID=31389067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13226587U Pending JPS6439633U (,) | 1987-09-01 | 1987-09-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439633U (,) |
-
1987
- 1987-09-01 JP JP13226587U patent/JPS6439633U/ja active Pending
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