JPS6439191A - Manufacture of vibration sensor - Google Patents

Abstract

PURPOSE:To improve yield and to manufacture a vibration sensor high in reliability at low cost by applying an adhesive effective in metal-to-metal adhesion on the shaft of a diaphragm after jointing and fixing a piezoelectric element, and fitting to a deadweight hole in a cylinder case. CONSTITUTION:An epoxy system of instant adhesive 17 greatly effective in metal-to-metal adhesion is applied to the shaft 5 of a diaphragm 6 after jointing and fixing a piezoelectric element 4. Next, two pieces of the diaphragms 6, a cylinder case 7 and a deadweight 9 are arranged in an assembling jig, pressurized by the assembling jig before the adhesives 17 is hardened and the shaft 5 of each plate 6 is fitted to the hole of the both ends central part of the deadweight 9. The rim of each diaphragm 6 is forcibly pushed into the inside of the both ends of the case 7 to make a solid assembly, the assembly body is removed from the assembling jig to harden the adhesives 17 and simultaneously the rim of each diaphragm 6 is fixed on the inner circumferential surface of the case 7. After the adhesives 17 and 8 are hardened, a viscosity liquid 10 is poured into the case 7 and a pouring opening is sealed. Thus, a yield is improved and the vibration sensor of a high reliability at low cost can be manufactured.