JPS6437687U - - Google Patents
Info
- Publication number
- JPS6437687U JPS6437687U JP13098187U JP13098187U JPS6437687U JP S6437687 U JPS6437687 U JP S6437687U JP 13098187 U JP13098187 U JP 13098187U JP 13098187 U JP13098187 U JP 13098187U JP S6437687 U JPS6437687 U JP S6437687U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- optical fiber
- counting device
- electronic counting
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13098187U JPH0526484Y2 (enExample) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13098187U JPH0526484Y2 (enExample) | 1987-08-28 | 1987-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6437687U true JPS6437687U (enExample) | 1989-03-07 |
| JPH0526484Y2 JPH0526484Y2 (enExample) | 1993-07-05 |
Family
ID=31386630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13098187U Expired - Lifetime JPH0526484Y2 (enExample) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526484Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013129209A1 (ja) * | 2012-03-01 | 2013-09-06 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1987
- 1987-08-28 JP JP13098187U patent/JPH0526484Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013129209A1 (ja) * | 2012-03-01 | 2013-09-06 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP2013182760A (ja) * | 2012-03-01 | 2013-09-12 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
| US9330883B2 (en) | 2012-03-01 | 2016-05-03 | Hitachi High-Technologies Corporation | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526484Y2 (enExample) | 1993-07-05 |
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